Gallium nitride-based compound semiconductor light-emitting device and negative electrode thereof
A gallium nitride-based compound semiconductor light-emitting device is disclosed which includes an n-type semiconductor layer of a gallium nitride-based compound semiconductor, a light-emitting layer of a gallium nitride-based compound semiconductor and a p-type semiconductor layer of a gallium nitride-based compound semiconductor formed on a substrate in this order, and has a negative electrode and a positive electrode provided on the n-type semiconductor layer and the p-type semiconductor layer, respectively. The negative electrode includes a bonding pad layer and a contact metal layer which is in contact with the n-type semiconductor layer, and the contact metal layer is composed of a Cr—Al alloy.
1. A gallium nitride-based compound semiconductor light-emitting device comprising an n-type semiconductor layer of a gallium nitride-based compound semiconductor, a light-emitting layer of a gallium nitride-based compound semiconductor and a p-type semiconductor layer of a gallium nitride-based compound semiconductor formed on a substrate in this order, and having a negative electrode and a positive electrode provided on the n-type semiconductor layer and the p-type semiconductor layer, respectively; wherein the negative electrode comprises a bonding pad layer, a contact metal layer which is in contact with the n-type semiconductor layer, and an Au—Sn alloy layer or a lead free solder layer which is provided on the bonding pad layer, and wherein the contact metal layer is composed of a Cr—Al alloy which has a Cr content of 20 to 80 mass %.
2. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the Cr—Al alloy has a Cr content of 40 to 60 mass %.
3. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the contact metal layer has a thickness of 1 to 500 nm.
4. A gallium nitride-based compound semiconductor light-emitting device according to claim 3 , wherein the contact metal layer has a thickness of 10 nm or more.
5. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the bonding pad layer is formed of a metal selected from the group consisting of Au, Al, Ni, and Cu, or an alloy containing the metal.
6. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the bonding pad layer has a thickness of 100 to 1,000 nm.
7. A gallium nitride-based compound semiconductor light-emitting device according to claim 6 , wherein the bonding pad layer has a thickness of 200 to 500 nm.
8. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the Au—Sn alloy layer has a thickness of 200 nm or more.
9. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the lead free solder layer has a thickness of 200 nm or more.
10. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the light-emitting device has an adhesion layer formed of Ti between the contact metal layer and the bonding pad layer.
11. A gallium nitride-based compound semiconductor light-emitting device according to claim 10 , wherein the adhesion layer has a thickness of 1 to 100 nm.
12. A gallium nitride-based compound semiconductor light-emitting device according to claim 11 , wherein the adhesion layer has a thickness of 10 nm or more.
13. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the light-emitting device has a barrier layer between the contact metal layer and the bonding pad layer.
14. A gallium nitride-based compound semiconductor light-emitting device according to claim 13 , wherein the barrier layer is formed of a metal selected from the group consisting of Ti, Zr, Hf, Ta, W, Re, Os, Ir, Pt, Fe, Co, Ni, Ru, Rh, and Pd, or an alloy containing the metal.
15. A gallium nitride-based compound semiconductor light-emitting device according to claim 14 , wherein the barrier layer is formed of a metal selected from the group consisting of Ti, Ta, W, and Pt, or an alloy containing the metal.
16. A gallium nitride-based compound semiconductor light-emitting device according to claim 13 , wherein the barrier layer has a thickness of 10 to 500 nm.
17. A gallium nitride-based compound semiconductor light-emitting device according to claim 16 , wherein the barrier layer has a thickness of 50 to 300 nm.
18. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the light-emitting device has a barrier layer between the bonding pad layer and the Au—Sn alloy layer.
19. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the light-emitting device has a barrier layer between the bonding pad layer and the lead free solder layer.
20. A gallium nitride-based compound semiconductor light-emitting device according to claim 1 , wherein the light-emitting device is of a flip-chip type.
21. A negative electrode for use in a gallium nitride-based compound semiconductor light-emitting device comprising a bonding pad layer and a contact metal layer which is in contact with the n-type semiconductor layer, wherein the contact metal layer is composed of a Cr—Al alloy.
22. A negative electrode for use in a gallium nitride-based compound semiconductor light-emitting device according to claim 21 , wherein the light-emitting device is of a flip-chip type.