Group III nitride semiconductor multilayer structure
An object of the present invention is to provide a Group III nitride semiconductor multilayer structure having a smooth surface and exhibiting excellent crystallinity, which multilayer structure employs a low-cost substrate that can be easily processed. Another object is to provide a Group III nitride semiconductor light-emitting device comprising the multilayer structure. The inventive Group III nitride semiconductor multilayer structure comprises a substrate; an Al x Ga 1-x N (0≦x≦1) buffer layer which is provided on the substrate and has a columnar or island-like crystal structure; and an Al x In y Ga 1-x-y N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) single-crystal layer provided on the buffer layer, wherein the substrate has, on its surface, non-periodically distributed grooves having an average depth of 0.01 to 5 μm.
1. A Group III nitride semiconductor multilayer structure comprising a substrate; an Al x Ga 1-x N (0≦x≦1) buffer layer which is provided on the substrate and has a columnar or island-like crystal structure; and an Al x In y Ga 1-x-y N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) single-crystal layer provided on the buffer layer, wherein the substrate has, on its surface, non-periodically distributed scratches having an average depth of 0.01 to 5 μm.
2. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the grooves have an average depth of 0.1 to 1 μm.
3. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the substrate is formed of sapphire single crystal or SiC single crystal.
4. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the buffer layer contains columnar crystal grains.
5. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the buffer layer has a thickness of 1 to 100 nm.
6. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the buffer layer is formed through continuously feeding of a Group III element source and a nitrogen source such that the ratio of nitrogen to a Group III element becomes 1,000 or less, or through feeding of merely a Group III element source (in the case where the nitrogen/Group III element ratio is zero).
7. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the single-crystal layer has a thickness of 1 to 20 μm.
8. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the single-crystal layer is formed through feeding of a Group III element source and a nitrogen source such that the nitrogen/Group III element ratio becomes 1,600 to 3,200.
9. A Group III nitride semiconductor multilayer structure according to claim 1 , wherein the single-crystal layer is formed while the temperature of the substrate is regulated so as to fall within a range of 1,000 to 1,300° C.
10. A Group III nitride semiconductor multilayer structure according to claim 9 , wherein the temperature of the substrate is regulated so as to fall within a range of 1,050 to 1,200° C.
11. A Group III nitride semiconductor light-emitting device comprising a Group III nitride semiconductor multilayer structure according to claim 1 ; Group III nitride semiconductor layers provided atop the single-crystal layer of the semiconductor multilayer structure, the semiconductor layers including an n-type layer, a light-emitting layer, and a p-type layer; and a negative electrode and a positive electrode which are provided at predetermined positions.
12. A Group III nitride semiconductor light-emitting device according to claim 11 , wherein the n-type layer, the light-emitting layer, and the p-type layer, which constitute the Group III nitride semiconductor layers, are successively provided atop the single-crystal layer in this order; the negative electrode is provided on the n-type layer; and the positive electrode is provided on the p-type layer.