Method of forming a stacked device filler
View Patent ↗Numerous embodiments of a stacked device filler and a method of formation are disclosed. In one embodiment, a method of forming a stacked device filler comprises forming a material layer between two or more substrates of a stacked device, and causing a reaction in at least a portion of the material, wherein the reaction may comprise polymerization, and the material layer may be one or a combination of materials, such as nonconductive polymer materials, for example.
1. A method of forming a stacked semiconductor device, comprising:
forming a layer of material on a portion of a top surface of a substrate, the substrate having an interconnect structure formed thereon;
selectively removing a portion of the layer of material to expose a portion of a top surface of the interconnect structure;
combining the substrate with another substrate to form a stacked semiconductor device;
causing a reaction in a portion of the layer of material wherein a portion of the area between the two substrates is filled with a polymer foam as a product of the reaction.
2. The method of claim 1 , wherein the reaction comprises polymerization.
3. The method of claim 1 , wherein the forming comprises spin coating.
4. The method of claim 3 , wherein the layer of material is spin-coated to a thickness greater than the top surface of the interconnect structure.
5. The method of claim 1 , wherein the selective removing comprises one or more of: chemical etch, dry etch, or mechanical etch.
6. The method of claim 1 , wherein the layer material is selected from the group consisting of: water, hydroxyl end-capped oligomers, and carboxylic acid end-capped polymers.
7. A method comprising:
forming a layer of material on a substrate including an interconnect structure formed thereon;
removing a portion of the layer of material such that a top surface of the layer of material is lower than a top surface of the interconnect structure to expose the top surface of the interconnect structure;
combining the substrate with another substrate; and
filling an area between the two substrates with a polymer foam as a product of a reaction in the layer of material.
8. The method of claim 7 , wherein the reaction in the layer of material comprises polymerization.
9. The method of claim 7 , wherein forming the layer of material comprises forming the layer of material to a thickness greater than the top surface of the interconnect structure.
10. The method of claim 7 , wherein the layer material is selected from the group consisting of water, hydroxyl end-capped oligomers, and carboxylic acid end-capped polymers.
11. A method of forming stacked wafers, comprising:
providing a first wafer having a first conductive interconnect structure and a first layer thereon, wherein at least a portion of the first conductive interconnect is exposed;
providing a second wafer having a second conductive interconnect structure and a second layer thereon, wherein at least a portion of the second conductive interconnect structure is exposed;
bonding the first conductive interconnect structure to the second conductive interconnect structure; and
chemically reacting the first layer with the second layer by introduction of one of a reactant, heat or a gas to form a foam filling in an area between the first and second wafers adjacent to the first and second conductive interconnect structures.
12. The method of claim 11 , further comprising:
thinning at least one of the first and second wafers, the foam providing structural support to the stacked wafers during the thinning.
13. The method of claim 11 , further comprising:
protecting the first and second interconnect structures from oxidation using the foam during a subsequent wafer process.