IP Library › Granted Patent US 6,835,942
Granted Patent Utility
US 6,835,942 · Confirmation No. 1972

METHOD FOR CORRECTING A PROXIMITY EFFECT, AN EXPOSURE METHOD, A MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE AND A PROXIMITY CORRECTION MODULE

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2004-10-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-16 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
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2004-09-16 1449 List of References cited by applicant and considered by examiner 1 View
2004-09-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-09-16 FWCLM Index of Claims 1 View
2004-09-16 BIB Bibliographic Data Sheet 1 View
2004-09-16 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-08-05 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-05-05 CTNF Non-Final Rejection 5 View
2004-05-05 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-05 892 List of references cited by examiner 1 View
2004-05-05 FWCLM Index of Claims 1 View
2004-05-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-21 OATH Oath or Declaration filed 2 View
2003-09-10 PEFN Pre-Exam Formalities Notice 2 View
2003-09-02 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-09-02 FRPR Certified Copy of Foreign Priority Application 41 View
2003-06-25 TRNA Transmittal of New Application 3 View
2003-06-25 SPEC Specification 28 View
2003-06-25 CLM Claims 8 View
2003-06-25 ABST Abstract 1 View
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Quick Facts
Patent No.
US 6,835,942
App. No.
10/602,670
Filed
2003-06-25
Granted
2004-12-28
Pub. No.
US20040075064A1
Art Unit
2881
PTA
-35 days