Semiconductor device and manufacturing method thereof, and registration accuracy measurement enhancement method
View Patent ↗A semiconductor device with an enhanced registration accuracy photo-mask used for manufacturing the device and a registration accuracy enhancement method are provided, by detecting lens aberration which causes problems in the process of manufacturing a semiconductor device. The semiconductor device includes an auxiliary mark including an inner mark having stepped portions with four sides as stepped portions to be detected and an outer mark having stepped portion as stepped portions to be detected, provided approximately parallel to stepped portions along four sides of the inner mark.
1. A semiconductor device, comprising:
an auxiliary mark used to detect aberration of a lens used for an exposure step of a semiconductor device so as to modify said lens unit to reduce said lens aberration,
said auxiliary mark including
an inner mark forming four sides of a first virtual rectangle on a semiconductor substrate when viewed two-dimensionally, and
an outer mark forming four sides of a second virtual rectangle analogous to the first virtual rectangle and having the same intersection point of diagonals as the first virtual rectangle when viewed two-dimensionally,
said inner mark and said outer mark being formed to have stepped portions, which stepped portions belong to one same layer and can be detected by a registration accuracy measurement device.
2. A semiconductor device according to claim 1 , wherein said outer mark having said stepped portions is formed as a box pattern, a line pattern, or a hole pattern.
3. A semiconductor device according to claim 1 , wherein said inner mark having said stepped portions is formed as a box pattern, a line pattern, or a hole pattern.
4. A semiconductor device according to claim 1 , wherein said outer mark having said stepped portions is formed either as a positive pattern or a negative pattern.
5. A semiconductor device according to claim 1 , wherein said inner mark having said stepped portions is formed either as a positive pattern or a negative pattern.
6. A semiconductor device according to claim 1 , wherein said auxiliary mark includes a plurality of said auxiliary marks dispersed across an entire exposure region on said semiconductor substrate.
7. A semiconductor device according to claim 1 , wherein said inner mark includes a plurality of said inner marks having said stepped portions and formed as patterns having different sizes.
8. A semiconductor device according to claim 1 , wherein said outer mark includes a plurality of said outer marks having said stepped portions and formed as patterns having different sizes.
9. A semiconductor device according to claim 1 , wherein a plurality of said inner marks having said stepped portions are formed to include a box pattern, a line pattern, and a hole pattern.
10. A semiconductor device according to claim 1 , wherein a plurality of said outer marks having said stepped portions are formed to include a box pattern, a line pattern, and a hole pattern.
11. A photo-mask used for manufacturing a semiconductor device, comprising:
an opening corresponding to a pattern of an auxiliary mark, said auxiliary mark including
an inner mark forming four sides of a first virtual rectangle when viewed two-dimensionally, and
an outer mark forming four sides of a second virtual rectangle analogous to the first virtual rectangle and having the same intersection point of diagonals as the first virtual rectangle when viewed two-dimensionally,
said inner mark and said outer mark being formed to have steps, which stepped portions belong to one same layer and can be detected by a registration accuracy measurement device.