IP Library Granted Patent US 7,141,180
Granted Patent B2
US 7,141,180 · App. 10/607,316 · Granted Nov 28, 2006

Etchant for wire, method of manufacturing wire using etchant, thin film transistor array panel including wire and manufacturing method thereof

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Quick Facts
Patent No.
US 7,141,180
App. No.
10/607,316
Granted
Nov 28, 2006
Kind
B2
Abstract

A method of manufacturing a TFT array panel according to the present invention forms a gate wire on an insulating substrate. The gate wire includes a plurality of gate lines and a plurality of gate electrodes connected to the gate lines. A semiconductor layer and a gate insulating layer are sequentially formed and a data wire is formed thereon. The data wire includes a plurality of data lines intersecting the gate lines, a plurality of source electrodes connected to the data lines and placed close to the gate electrodes, and a plurality of drain electrodes opposite the source electrodes with respect to the gate electrodes. A passivation layer is deposited and patterned to form a plurality of contact holes exposing the drain electrodes at least. A conductive layer made of Ag or Ag alloy is deposited on the passivation layer, and is patterned using an etchant containing ferric nitrate, nitric acid, acetic acid, hexamethylenetetramine and deionized water to form a plurality of reflective films electrically connected to the drain electrodes.

Claims (2)

1. An etchant for a wire comprising:

ferric nitrate, nitric acid, acetic acid, hexamethylenetetramine, and deionized water, wherein the etchant removes silver or silver alloys, wherein the ferric nitrate is in a range of 1–5% by weight the nitric acid is in a range of 1–5% by weight, the acetic acid is in a range of 5–20% by weight, the hexamethylenetetramine is in a range of 0.05–1% by weight, and the ionized water is the remainder.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 23, 2012
From: SAMSUNG ELECTRONICS CO., LTD.
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 029009/0026 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2003
From: PARK, HONG-SICK; KANG, SUNG-CHUL; CHO, HONG-JE
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 014243/0295 →