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App. No. 10/608,300 · Confirmation No. 9021

Optical metrology of structures formed on semiconductor wafer using machine learning systems

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-04-27 LET. Miscellaneous Incoming Letter 2 View
2009-03-27 ABN Abandonment 2 View
2009-02-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 12 View
2009-01-08 APDA Patent Board Decision - Examiner Affirmed 12 View
2008-11-12 APCH Confirmation of Hearing by Appellant 2 View
2008-10-27 APNH Notification of Appeal Hearing 3 View
2008-07-28 AP_DK_M Appeal Docketing Notice 2 View
2008-01-08 RBNE Reply Brief Noted - Patent Board 2 View
2008-01-08 BIB Bibliographic Data Sheet 1 View
2007-08-13 APOH Request for Oral Hearing 1 View
2007-08-13 APRB Reply Brief Filed 13 View
2007-08-13 LET. Miscellaneous Incoming Letter 3 View
2007-08-13 136A Authorization for Extension of Time all replies 3 View
2007-06-12 APEA Examiner's Answer to Appeal Brief 15 View
2007-06-12 BIB Bibliographic Data Sheet 1 View
2007-02-13 AP.B Appeal Brief Filed 15 View
2007-02-13 LET. Miscellaneous Incoming Letter 4 View
2007-02-13 XT/ Extension of Time 1 View
2007-02-12 AP.B Appeal Brief Filed 15 View
2007-02-12 LET. Miscellaneous Incoming Letter 3 View
2007-02-12 XT/ Extension of Time 1 View
2007-02-12 AP.B Appeal Brief Filed 16 View
2007-02-12 LET. Miscellaneous Incoming Letter 3 View
2007-02-12 XT/ Extension of Time 1 View
2006-12-11 N/AP Notice of Appeal Filed 1 View
2006-12-11 XT/ Extension of Time 1 View
2006-12-11 LET. Miscellaneous Incoming Letter 3 View
2006-11-13 CTAV Advisory Action (PTOL-303) 3 View
2006-11-13 BIB Bibliographic Data Sheet 1 View
2006-10-11 A.NE Response After Final Action 3 View
2006-10-11 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2006-08-11 CTFR Final Rejection 11 View
2006-08-11 BIB Bibliographic Data Sheet 1 View
2006-08-11 FWCLM Index of Claims 1 View
2006-05-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2006-05-15 CLM Claims 7 View
2006-05-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-05-15 WFEE Fee Worksheet (SB06) 1 View
2006-02-15 CTNF Non-Final Rejection 9 View
2006-02-15 892 List of references cited by examiner 1 View
2006-02-15 BIB Bibliographic Data Sheet 2 View
2006-02-15 FWCLM Index of Claims 1 View
2006-02-15 SRFW Search information including classification, databases and other search related notes 1 View
2006-02-10 SRNT Examiner's search strategy and results 2 View
2006-01-06 A.NE Response After Final Action 3 View
2006-01-06 CLM Claims 6 View
2006-01-06 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2006-01-06 WFEE Fee Worksheet (SB06) 1 View
2005-10-06 CTFR Final Rejection 9 View
2005-10-06 892 List of references cited by examiner 1 View
2005-10-06 FOR Foreign Reference 20 View
2005-10-06 BIB Bibliographic Data Sheet 2 View
2005-10-06 FWCLM Index of Claims 1 View
2005-10-06 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-30 SRNT Examiner's search strategy and results 2 View
2005-09-28 SRNT Examiner's search strategy and results 5 View
2005-06-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2005-06-30 CLM Claims 6 View
2005-06-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-06-30 WFEE Fee Worksheet (SB06) 1 View
2005-03-30 CTNF Non-Final Rejection 7 View
2005-03-30 892 List of references cited by examiner 1 View
2005-03-30 FWCLM Index of Claims 1 View
2005-03-30 SRFW Search information including classification, databases and other search related notes 1 View
2005-03-30 BIB Bibliographic Data Sheet 1 View
2005-03-22 SRNT Examiner's search strategy and results 2 View
2003-06-27 TRNA Transmittal of New Application 2 View
2003-06-27 SPEC Specification 17 View
2003-06-27 CLM Claims 6 View
2003-06-27 ABST Abstract 1 View
2003-06-27 DRW Drawings-only black and white line drawings 6 View
2003-06-27 OATH Oath or Declaration filed 6 View
2003-06-27 ADS Application Data Sheet 2 View
2003-06-27 WFEE Fee Worksheet (SB06) 1 View
2003-06-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/608,300
Filed
2003-06-27
Pub. No.
US20040267397A1
Art Unit
2129