Wafer-level package with silicon gasket
View Patent ↗A gasket encloses a hermetically sealed environment between a cap wafer and a base wafer. The gasket is bonded to the base wafer using bonding material. The bonding material can be one or more of many substances that exhibit acceptable adhesion, sealing, and other properties that ensure a hermetically sealed environment. The gasket is carved out from the cap wafer material itself. The cap wafer is typically made of extremely strong and rigid material such as silicon. Since the gasket is made from the cap wafer, the gasket itself is also extremely strong and rigid.
1. A method for manufacturing a wafer-level package, comprising:
providing a first wafer and a second wafer;
removing a portion from the first wafer to form a gasket;
forming a pad on the second wafer, the pad projecting from a surface of the second wafer and substantially matching the gasket;
interposing bonding material between the gasket and the pad; and
bonding the gasket to the pad with the bonding material to create a hermetically sealed environment between the first and second wafers.
2. The method of claim 1 wherein the first wafer consists of silicon.
3. The method of claim 2 wherein the gasket is no more than 20 um wide.
4. The method of claim 3 wherein the gasket is no more than 10 um wide.
5. The method of claim 3 wherein interposing bonding material includes depositing bonding material on the gasket.
6. The method of claim 3 wherein interposing bonding material includes depositing bonding material on the pad.
7. The method of claim 3 wherein the bonding material includes conductive bonding material.
8. The method of claim 7 wherein the conductive bonding material is a metal selected from the group consisting of gold, gold-tin, tin-lead, and palladium-tin.
9. The method of claim 3 wherein the bonding material includes non-conductive bonding material.
10. The method of claim 9 wherein the non-conductive bonding material is a material selected from the group consisting of polyimide, B-staged bisbenzocyclobutene (BCB), and glass.
11. The method of claim 10 wherein interposing an adhesion promoter between the gasket and the pad occurs after interposing bonding material.
12. A method for manufacturing a wafer-level package, comprising:
providing a first wafer and a second wafer;
forming a pad on the second wafer, the pad having a surface for bonding with a gasket of the first wafer, the surface being located a distance away from a surface of the second wafer where the pad is formed;
interposing bonding material between the gasket and the pad; and
bonding the gasket to the pad with the bonding material to create a hermetically sealed environment between the first and second wafers.