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App. No. 10/620,560 · Confirmation No. 9252

Solutions and processes for removal of sidewall residue after dry etching

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2010-06-07 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2010-06-07 ABN Abandonment 2 View
2010-06-07 ABN Abandonment 1 View
2010-04-02 APDA Patent Board Decision - Examiner Affirmed 10 View
2009-05-04 AP_DK_M Appeal Docketing Notice 2 View
2008-07-10 RBNE Reply Brief Noted - Patent Board 2 View
2008-04-22 APRB Reply Brief Filed 3 View
2008-04-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-04-08 M327 Miscellaneous Communication to Applicant - No Action Count 2 View
2008-04-08 1449 List of References cited by applicant and considered by examiner 2 View
2008-02-22 APEA Examiner's Answer to Appeal Brief 29 View
2007-12-31 SRNT Examiner's search strategy and results 2 View
2007-12-31 SRNT Examiner's search strategy and results 2 View
2007-12-20 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2007-12-20 1449 List of References cited by applicant and considered by examiner 2 View
2007-09-18 AP.B Appeal Brief Filed 14 View
2007-09-18 XT/ Extension of Time 1 View
2007-09-10 TRAN.LET Transmittal Letter 4 View
2007-09-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2007-09-10 FOR Foreign Reference 4 View
2007-09-10 FOR Foreign Reference 6 View
2007-09-10 WFEE Fee Worksheet (SB06) 2 View
2007-09-10 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-05-15 N/AP Notice of Appeal Filed 1 View
2007-05-15 XT/ Extension of Time 1 View
2007-04-18 CTAV Advisory Action (PTOL-303) 3 View
2007-04-04 CTAV Advisory Action (PTOL-303) 3 View
2007-04-04 892 List of references cited by examiner 1 View
2007-04-04 FOR Foreign Reference 2 View
2007-04-04 FOR Foreign Reference 6 View
2007-04-04 FOR Foreign Reference 4 View
2007-04-04 FOR Foreign Reference 3 View
2007-04-04 FOR Foreign Reference 5 View
2007-04-04 FOR Foreign Reference 2 View
2007-04-04 FOR Foreign Reference 1 View
2007-03-15 A.NE Response After Final Action 1 View
2007-03-15 CLM Claims 2 View
2007-03-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2007-03-15 XT/ Extension of Time 1 View
2007-03-15 WFEE Fee Worksheet (SB06) 1 View
2006-11-15 CTFR Final Rejection 9 View
2006-08-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-08-23 CLM Claims 3 View
2006-08-23 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-08-23 XT/ Extension of Time 1 View
2006-08-23 WFEE Fee Worksheet (SB06) 1 View
2006-02-23 CTNF Non-Final Rejection 9 View
2005-12-12 RCEX Request for Continued Examination (RCE) 1 View
2005-12-12 XT/ Extension of Time 1 View
2005-12-12 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-12-12 WFEE Fee Worksheet (SB06) 1 View
2005-12-01 WFEE Fee Worksheet (SB06) 2 View
2005-10-20 CTAV Advisory Action (PTOL-303) 3 View
2005-10-20 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-10-12 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-10-12 CLM Claims 2 View
2005-10-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-10-12 XT/ Extension of Time 1 View
2005-10-12 WFEE Fee Worksheet (SB06) 1 View
2005-08-12 N/AP Notice of Appeal Filed 1 View
2005-08-12 XT/ Extension of Time 1 View
2005-04-12 CTFR Final Rejection 7 View
2005-04-12 1449 List of References cited by applicant and considered by examiner 2 View
2004-12-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-16 CLM Claims 2 View
2004-12-16 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-12-16 WFEE Fee Worksheet (SB06) 1 View
2004-12-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-11-10 A.I. Informal or Non-Responsive Amendment 1 View
2004-11-10 CLM.NE Claim-Amendment Not Entered 2 View
2004-11-10 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-11-10 WFEE Fee Worksheet (SB06) 1 View
2004-07-07 CTNF Non-Final Rejection 6 View
2004-07-07 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-07 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-28 SRNT Examiner's search strategy and results 5 View
2003-07-17 TRNA Transmittal of New Application 2 View
2003-07-17 SPEC Specification 6 View
2003-07-17 CLM Claims 2 View
2003-07-17 ABST Abstract 1 View
2003-07-17 DRW Drawings-only black and white line drawings 4 View
2003-07-17 OATH Oath or Declaration filed 4 View
2003-07-17 ADS Application Data Sheet 2 View
2003-07-17 A.PE Preliminary Amendment 1 View
2003-07-17 CLM Claims 1 View
2003-07-17 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-17 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2003-07-17 NDRW Transmittal Letter accompanying New/Additional Drawings 1 View
2003-07-17 WCLM Claims Worksheet (PTO-2022) 1 View
2003-07-17 WFEE Fee Worksheet (SB06) 1 View
2003-07-17 WFEE Fee Worksheet (SB06) 1 View
2003-07-17 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
10/620,560
Filed
2003-07-17
Pub. No.
US20040016719A1
Art Unit
1716