Manufacturing method for an electronic device, and the electronic device
View Patent ↗The present invention provides a manufacturing method for an electronic device that enables high-yield manufacturing of electronic devices, by detecting potential short circuits between a contact plug and a conductive part contacting the periphery of the contact plug, directly after forming the contact plug; and the electronic device. The manufacturing method includes a hole-forming step of forming a contact hole in an insulating film that covers a conductive part formed on a first main surface of a substrate and an area surrounding the conductive part, the hole being formed beside the conductive part, and the conductive part including a first material; a material-supplying step of supplying a second material to the contact hole, the second material having a reactive property with the first material; and an inspection step, after the second material has been supplied, of inspecting for evidence of a reaction by the conductive part with the second material.
1. A manufacturing method for an electronic device, comprising:
a hole-forming step of forming a contact hole in an insulating film that covers a conductive part formed on a first main surface of a substrate and an area surrounding the conductive part, the hole being formed beside the conductive part, and the conductive part including a first material;
a fluid-supplying step of supplying a second fluid material to the contact hole, the second fluid material having a reactive property with the first material; and
an inspection step, after the second fluid material has been supplied, of inspecting for evidence of a reaction by the conductive part with the second fluid material.
2. The manufacturing method of claim 1 , wherein
the reactive property of the second fluid material causes the conductive part to be eroded on contact with the second fluid material, and
in the inspection step, evidence that the conductive part has been eroded is inspected for.
3. The manufacturing method of claim 2 , wherein
in the inspection step, evidence of erosion is inspected for optically.
4. The manufacturing method of claim 3 , wherein
in the inspection step, evidence of erosion is inspected for after removing the second fluid material from the contact hole.
5. The manufacturing method of claim 4 , wherein
the first material is one of tungsten and a tungsten alloy, and
the second fluid material is a solution including one of hydrogen peroxide and ozone.
6. The manufacturing method of claim 5 , wherein
in the fluid-supplying step, the solution is supplied to the contact hole under a condition by which the solution is able to selectively erode the conductive part.
7. The manufacturing method of claim 1 , wherein
the electronic device is a memory device that includes a plurality of components that function as field effect transistors, and
the conductive part is a function electrode that is formed before the hole-forming step by applying a design rule that stipulates an electrode width of 0.18 μm or less.
8. The manufacturing method of claim 3 , wherein
the conductive part includes a large-area portion that is sufficient in size to enable inspection thereof with an optical microscope for evidence of the reaction, and
in the inspection step, evidence of the reaction in the large-area portion is inspected for.
9. The manufacturing method of claim 2 , wherein
in the inspection step, after a material including at least the second fluid material has been removed, presence of at least one of the first material and a compound of the first material and the second fluid material is inspected for in the removed material.
10. The manufacturing method of claim 1 , wherein
the substrate has a pre-formed inspection area that is independent of other circuits areas,
in the fluid-supplying step a contact hole formed in the inspection area is subject to the inspection, and
in the inspection step, a conductive part formed in the inspection area is subject to the inspection.
11. The manufacturing method of claim 1 , wherein
in the hole forming step, the contact hole is formed using a self-align contact method.
12. The manufacturing method of claim 11 , wherein
a silicon nitride film is provided on the substrate as an etching stopper layer in the hole forming step.
13. The manufacturing method of claim 12 , wherein
the insulating film is formed of boron phosphorus silicon glass, and
the first material has an etching selectivity ratio of 100 or higher in relation to material that composes the etching stopper layer and material that composes the insulating film.
14. An inspection method for a semiconductor member having a plurality of layers of at least two different materials formed on a substrate with portions thereof selectively removed to provide one of an electronic device and a pre-form thereof, comprising:
applying a fluid having a first characteristic property of being non-reactive to those exposed layers of the plurality of layers when one of the electronic device and the pre-form thereof is properly fabricated and a second characteristic of being reactive to one or more layers of the plurality of layers that are not exposed when properly fabricated; and
detecting a fluid reaction with one or more of materials to determine a flaw in fabrication of the one of the electronic device and the pre-form.
15. The inspection method of claim 14 wherein the step of detecting is performed with a scanning electron microscope.
16. The inspection method of claim 14 wherein the fluid reaction erodes away one or more of the different materials.
17. The inspection method of claim 14 wherein the fluid reaction provides an eluted byproduct.
18. The manufacturing method of claim 1 , wherein
the electronic device is a memory device that includes a plurality of components that function as field effect transistors.
19. The manufacturing method of claim 1 , wherein
the conductive part is a function electrode.