ROM embedded DRAM with dielectric removal/short
View Patent ↗A ROM embedded DRAM allows hard programming of ROM cells by shorting DRAM capacitor plates during fabrication. In one embodiment, the intermediate dielectric layer is removed and the plates are shorted with a conductor. In another embodiment, an upper conductor and dielectric are removed and a conductor is fabricated in contact with the DRAM storage plate. The memory allows ROM cells to be hard programmed to different data states, such as Vcc and Vss.
1. A method of fabricating an integrated circuit read only memory (ROM) cell comprising:
fabricating a first conductor layer vertically above a substrate;
fabricating a dielectric layer over the first conductor layer;
fabricating a second conductor layer over the dielectric layer;
selectively removing a portion of the second conductor layer and the dielectric layer to expose the first conductor layer; and
electrically coupling the exposed first conductor to receive a program voltage.
2. The method of claim 1 wherein the first conductor layer comprises hemispherical grained (HSG) polysilicon.
3. The method of claim 2 wherein the hemispherical grained (HSG) polysilicon is fabricated by the method comprising:
fabricating a layer of in situ doped polysilicon;
depositing undoped HSG over the layer of doped polysilicon; and
applying heat to conductively dope the overlying HSG layer.
4. The method of claim 2 wherein the hemispherical grained (HSG) polysilicon is in situ doped with arsenic.
5. The method of claim 1 wherein the dielectric layer comprises either Ta 2 O 5 or an oxide-nitride-oxide (ONO) dielectric.
6. The method of claim 1 wherein the second conductor layer comprises polysilicon.
7. The method of claim 1 wherein electrically coupling the exposed first conductor comprises fabricating a third conductor layer in contact with the exposed first conductor.
8. The method of claim 7 wherein the third conductor layer comprises polysilicon.
9. The method of claim 1 wherein electrically coupling the exposed first conductor comprises fabricating conductive plug in contact with the exposed first conductor.
10. A method of fabricating an integrated circuit read only memory (ROM) cell comprising:
fabricating a first conductor layer vertically above a substrate;
fabricating a dielectric layer over the first conductor layer;
fabricating a second conductor layer over the dielectric layer;
selectively etching a portion of the second conductor layer and the dielectric layer to form a plug opening and expose the first conductor layer; and
forming a conductive plug in the plug opening to electrically couple the first conductor to receive a program voltage.
11. The method of claim 10 wherein the first conductor layer comprises hemispherical grained (HSG) polysilicon, the dielectric layer comprises either Ta 2 O 5 or an oxide-nitride-oxide (ONO) dielectric, and the second conductor layer comprises polysilicon.
12. A method of fabricating a memory device comprising:
fabricating first and second capacitors;
removing dielectric material from the first capacitor;
coupling a storage node of the first capacitor to a voltage source node;
forming a first access transistor to couple the storage node of the first capacitor to a digit line; and
forming a second access transistor to couple the second capacitor to the digit line.
13. The method of claim 12 wherein coupling the storage node of the first capacitor to the voltage source node comprises fabricating a conductive plug in contact with the storage node.
14. The method of claim 12 further comprises removing a top conductor of the first capacitor.
15. The method of claim 14 wherein coupling the storage node of the first capacitor to the voltage source node comprises fabricating a conductive layer in contact with the storage node after the top conductor and dielectric are removed.