Capacitor element and production thereof
View Patent ↗A capacitor element includes a lower electrode, a ferroelectric film, and an upper electrode that are formed on a substrate. In the capacitor element, the ferroelectric film is formed by a reaction rate-determining method, and the lower electrode has a thickness of not more than 100 nm, and variation of the thickness of not more than 10%. With this, a capacitor element in which the composition variation of the ferroelectric film is suppressed, and a method for producing the same, are provided.
1. A capacitor element composed of a lower electrode, a ferroelectric film, containing Bi, and an upper electrode that are formed on a substrate, the ferroelectric film being formed on the lower electrode,
wherein the ferroelectric film is formed by a reaction rate-determining method and has a chemical composition with a substantially constant elemental proportion,
the lower electrode has a thickness of not more than 100 nm, and variation of the thickness of not more than 10% and,
a Bi content of the ferroelectric film formed on the lower electrode exhibits substantially no variation.
2. The capacitor element according to claim 1 ,
wherein the ferroelectric film is made of at least one material selected from the group consisting of SBT (SrBi 2 Ta 2 O 9 ), SBT doped with a metal of Nb, (Bi 4−X , La X )Ti 3 O 12 (where X satisfies 0.25≦X≦1.25), and (Pb, Zr)TiO 3 .
3. The capacitor element according to claim 1 ,
wherein the reaction rate-determining method is a metal organic chemical vapor deposition (MOCVD) method.
4. The capacitor element according to claim 1 ,
wherein the lower electrode is formed in a recessed shape.
5. The capacitor element according to claim 1 ,
wherein the lower electrode is formed on a conductive multilayer film containing metal oxide.
6. The capacitor element according to claim 1 ,
wherein the lower electrode in contact with the ferroelectric film contains a rare metal.
7. The capacitor element according to claim 6 ,
the lower electrode containing the rare metal is at least one film selected from the group consisting of films selected from the group consisting of platinum (Pt), iridium (Ir), ruthenium (Ru), gold (Au), silver (Ag), and palladium (Pd), films made of alloys containing these, and films made of oxides containing these.
8. The capacitor element according to claim 1 , wherein the lower electrode is formed in a projected shape.
9. The capacitor element according to claim 1 , wherein the lower electrode is formed in a columnar shape that extends in a vertical direction.
10. The capacitor element according to claim 1 , further comprising an insulating film adjacent the lower electrode,
the lower electrode having a planar upper surface, the insulating film having an upper surface that is substantially co-planar with the upper surface of the lower electrode,
the ferroelectric film being formed on the insulating film and the lower electrode.
11. A method for producing a capacitor element comprising:
forming an insulation film on a substrate;
forming a trench with a depth of not more than 100 nm in a part of the insulation film;
forming a first conductive film on the insulation film, including inside of the trench;
forming a lower electrode by polishing a surface of the first conductive film so that the first conductive film remains only in the inside of the trench;
forming a ferroelectric film containing Bi on the insulation film and the lower electrode by a reaction rate-determining method; and
forming an upper electrode on the ferroelectric film,
wherein the lower electrode has a thickness of not more than 100 nm and variation of the thickness of not more than 10%, and
a Bi content of the ferroelectric film formed on the lower electrode exhibits substantially no variation.
12. The method according to claim 11 , further comprising:
removing a part of the insulation film so as to expose at least a part of the lower electrode above the insulation film, the removal being carried out between the lower electrode formation and the ferroelectric film formation.
13. The method according to claim 11 ,
wherein the lower electrode is formed on a plurality of the trenches.
14. The method according to claim 11 ,
wherein the lower electrode is formed on a conductive multilayer film containing a metal oxide.
15. The method according to claim 11 ,
wherein the ferroelectric film is made of at least one material selected from SBT (SrBi 2 Ta 2 O 9 ), SBT doped with a metal of Nb, (Bi 4−X , La X )Ti 3 O 12 (where X satisfies 0.25≦X≦1.25), and (Pb, Zr)TiO 3 .
16. The method according to claim 11 ,
wherein the reaction rate-determining method is a metal organic chemical vapor deposition (MOCVD) method.
17. The method according to claim 11 ,
wherein the lower electrode is formed in a projected shape or a recessed shape.
18. The method according to claim 11 ,
wherein the lower electrode in contact with the ferroelectric film contains a rare metal.
19. The method according to claim 18 ,
wherein the lower electrode containing the rare metal is at least one film selected from the group consisting of films selected from the group consisting of platinum (Pt), iridium (Ir), ruthenium (Ru), gold (Au), silver (Ag), and palladium (Pd), respectively, films made of alloys containing these, and films made of oxides containing these.