Nitrogen passivation of interface states in SiO
View Patent ↗A nitrided oxide layer on a silicon carbide layer is processed by annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient. The anneal may be carried out at a temperature of greater than about 900° C., for example, a temperature of about 1100° C., a temperature of about 1200° C. or a temperature of about 1300° C. Annealing the nitrided oxide layer may be carried out at a pressure of less than about 1 atmosphere, for example, at a pressure of from about 0.01 to about 1 atm or, in particular, at a pressure of about 0.2 atm. The nitrided oxide layer may be an oxide layer that is grown in a N 2 O and/or NO containing ambient, that is annealed in a N 2 O and/or NO containing ambient or that is grown and annealed in a N 2 O and/or NO containing ambient.
1. A method of processing a nitrided oxide layer on a silicon carbide layer, the method comprising:
annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient, wherein the substantially oxygen-free nitrogen containing ambient comprises a NH 3 containing ambient, wherein the substantially oxygen-free nitrogen containing ambient comprises NH 3 and SiH 4 .
2. The method of claim 1 , wherein the SiH 4 and NH 3 are provided in a reaction chamber containing the nitrided oxide layer such that the SiH 4 and NH 3 are not mixed until a region of the reaction chamber proximate the nitrided oxide layer.
3. The method of claim 1 , wherein the nitrided oxide layer comprises a thermally grown oxide layer.
4. The method of claim 1 , wherein the nitrided oxide layer comprises a deposited oxide layer.
5. The method of claim 1 , wherein annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient comprises annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient at a temperature of greater than about 1000° C. and at a pressure of less than 1 atmosphere.
6. The method of claim 1 , wherein annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient is carried out at a temperature of about 1300° C.