Manufacturing method for electric device
View Patent ↗The present invention provides a method of manufacturing an electric device, wherein an adhesive applied on a flexible wiring board is heated to a first temperature to lower its viscosity to a sufficient level, after which a semiconductor chip is placed onto the adhesive at a preset location, so that no air is trapped in the adhesive. The adhesive is heated to a second temperature higher than the first temperature in a permanent bonding step to increase its viscosity, whereby any remaining voids are removed with residual adhesive being pushed aside. Having no voids in the adhesive, the resultant electric device is highly reliable in respect of conductivity.
1. A method of manufacturing an electric device including a bonding step wherein a semiconductor chip and a substrate are aligned so that a connection terminal on the semiconductor chip and a connection terminal on the substrate face each other, the semiconductor chip is placed onto an adhesive applied on the substrate, and heat is applied while pressing the semiconductor chip so as to connect the opposing connection terminals to each other, and a temperature of the adhesive showing the lowest viscosity is higher than a reaction start temperature, the bonding step including the steps of:
a preheating step of preheating the adhesive to a first temperature no less than the reaction start temperature of the adhesive and below a reaction peak temperature of the adhesive to reduce the viscosity of the adhesive;
a temporary bonding step applying pressure to press the semiconductor chip onto the adhesive while maintaining the adhesive at the first temperature, wherein the pressing of the semiconductor chip onto the adhesive does not cause the connection terminal on the semiconductor chip to contact the connection terminal on the substrate; and
a permanent bonding step of applying pressure to the semiconductor chip in order to make the connection terminal on the semiconductor chip contact the connection terminal on the substrate, and heating the adhesive to a second temperature higher than the first temperature in order to cure the adhesive.
2. The method of manufacturing an electric device according to claim 1 , wherein the second temperature is equal to, or higher than, the reaction peak temperature of the adhesive.
3. The method of manufacturing an electric device according to claim 1 , wherein the temporary bonding step comprises placing the substrate onto a first table, and heating the first table to the first temperature.
4. The method of manufacturing an electric device according to claim 2 , wherein the temporary bonding step comprises placing the substrate onto a first table, and heating the first table to the first temperature.
5. The method of manufacturing an electric device according to claim 1 , wherein the temporary bonding step comprises applying pressure to press the semiconductor chip onto the adhesive after aligning the semiconductor chip and the substrate.
6. The method of manufacturing an electric device according to claim 2 , wherein the temporary bonding step comprises applying pressure to press the semiconductor chip onto the adhesive after aligning the semiconductor chip and the substrate.
7. The method of manufacturing an electric device according to claim 3 , wherein the permanent bonding step comprises transferring the substrate onto a second table different from the first table.
8. The method of manufacturing an electric device according to claim 4 , wherein the permanent bonding step comprises transferring the substrate onto a second table different from the first table.
9. The method of manufacturing an electric device according to claim 1 , wherein the permanent bonding step comprises heating a heatable pressing head to the second temperature and applying pressure to the semiconductor chip with the pressing head.
10. The method of manufacturing an electric device according to claim 2 , wherein the permanent bonding step comprises heating a heatable pressing head to the second temperature and applying pressure to the semiconductor chip with the pressing head.
11. The method of manufacturing an electric device according to claim 1 , wherein the permanent bonding step comprises bringing the opposing connection terminals into contact with each other, and heating the adhesive to the second temperature thereafter.
12. The method of manufacturing an electric device according to claim 2 , wherein the permanent bonding step comprises bringing the opposing connection terminals into contact with each other, and heating the adhesive to the second temperature thereafter.
13. The method of manufacturing an electric device according to claim 1 , wherein the temporary bonding step further comprises maintaining the first temperature of the adhesive and increasing the viscosity of the adhesive.
14. The method of manufacturing an electric device according to claim 1 , wherein the temporary bonding step further comprises maintaining the first temperature of the adhesive in order to be 2% to 20% of reaction rate of the adhesive.
15. The method of manufacturing an electric device according to claim 1 , wherein the adhesive includes a thermosetting resin and a latent curing agent.