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App. No. 10/649,099 · Confirmation No. 4957

Methods of reducing or removing micromasking residue prior to metal etch using oxide hardmask

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2009-07-20 ABN Abandonment 2 View
2009-01-13 PETDEC Petition Decision 3 View
2008-12-30 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2008-10-21 A.NE Response After Final Action 1 View
2008-10-21 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2008-10-21 PET.SPRE Petition for review by the Technology Center Special Program Examiner(SPRE) 5 View
2008-10-21 AF/D Affidavit-submitted prior to Mar 15, 2013 10 View
2008-10-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-08-20 CTFR Final Rejection 12 View
2008-08-20 SRNT Examiner's search strategy and results 14 View
2008-08-20 SRFW Search information including classification, databases and other search related notes 1 View
2008-08-20 BIB Bibliographic Data Sheet 1 View
2008-06-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-06-03 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 7 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 6 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 9 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 5 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 6 View
2008-06-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-03-03 CTNF Non-Final Rejection 10 View
2008-03-03 892 List of references cited by examiner 1 View
2008-03-03 BIB Bibliographic Data Sheet 1 View
2008-03-03 SRNT Examiner's search strategy and results 13 View
2008-03-03 FWCLM Index of Claims 2 View
2008-03-03 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-01-09 CLM Claims 7 View
2008-01-09 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-01-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-01-09 WFEE Fee Worksheet (SB06) 1 View
2007-10-10 CTNF Non-Final Rejection 5 View
2007-10-10 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2007-10-10 BIB Bibliographic Data Sheet 1 View
2007-10-10 FWCLM Index of Claims 1 View
2007-10-10 SRFW Search information including classification, databases and other search related notes 1 View
2007-05-25 SRNT Examiner's search strategy and results 12 View
2007-03-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-03-05 CLM Claims 6 View
2007-03-05 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-03-05 TRNA Transmittal of New Application 1 View
2007-03-05 WFEE Fee Worksheet (SB06) 1 View
2006-11-30 CTNF Non-Final Rejection 8 View
2006-11-30 892 List of references cited by examiner 1 View
2006-11-30 FWCLM Index of Claims 1 View
2006-11-30 BIB Bibliographic Data Sheet 1 View
2006-11-30 SRFW Search information including classification, databases and other search related notes 1 View
2006-11-14 SRNT Examiner's search strategy and results 19 View
2006-10-20 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-10-20 CLM Claims 7 View
2006-10-20 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-10-20 RCEX Request for Continued Examination (RCE) 1 View
2006-10-20 XT/ Extension of Time 1 View
2006-10-20 LET. Miscellaneous Incoming Letter 1 View
2006-10-20 WFEE Fee Worksheet (SB06) 1 View
2006-09-29 CTAV Advisory Action (PTOL-303) 3 View
2006-09-29 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-09-29 BIB Bibliographic Data Sheet 1 View
2006-09-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-08-08 A.NE Response After Final Action 1 View
2006-08-08 CLM Claims 8 View
2006-08-08 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2006-08-08 LET. Miscellaneous Incoming Letter 1 View
2006-08-08 WFEE Fee Worksheet (SB06) 1 View
2006-08-08 FWCLM Index of Claims 1 View
2006-05-18 CTFR Final Rejection 14 View
2006-05-18 1449 List of References cited by applicant and considered by examiner 1 View
2006-05-18 892 List of references cited by examiner 1 View
2006-05-18 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-18 FWCLM Index of Claims 1 View
2006-05-18 BIB Bibliographic Data Sheet 1 View
2006-05-10 SRNT Examiner's search strategy and results 10 View
2006-03-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-03-03 CLM Claims 7 View
2006-03-03 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2006-03-03 WFEE Fee Worksheet (SB06) 1 View
2005-11-29 PGA9.DEC Decision for a Request for Corrected Patent Application Publication 2 View
2005-11-29 CTNF Non-Final Rejection 12 View
2005-11-29 1449 List of References cited by applicant and considered by examiner 1 View
2005-11-29 892 List of references cited by examiner 1 View
2005-11-29 FOR Foreign Reference 2 View
2005-11-29 BIB Bibliographic Data Sheet 1 View
2005-11-29 FWCLM Index of Claims 1 View
2005-11-29 SRFW Search information including classification, databases and other search related notes 1 View
2005-11-16 SRNT Examiner's search strategy and results 6 View
2005-10-12 ELC. Response to Election / Restriction Filed 1 View
2005-10-12 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-10-12 WFEE Fee Worksheet (SB06) 1 View
2005-09-19 CTRS Requirement for Restriction/Election 4 View
2005-09-19 BIB Bibliographic Data Sheet 2 View
2005-04-28 PGA9 Request/Corrected Patent Application Publications 4 View
2003-08-26 TRNA Transmittal of New Application 1 View
2003-08-26 SPEC Specification 22 View
2003-08-26 CLM Claims 11 View
2003-08-26 ABST Abstract 1 View
2003-08-26 DRW Drawings-only black and white line drawings 5 View
2003-08-26 OATH Oath or Declaration filed 2 View
2003-08-26 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2003-08-26 WFEE Fee Worksheet (SB06) 1 View
2003-08-26 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/649,099
Filed
2003-08-26
Pub. No.
US20050048788A1
Art Unit
1792