Method of forming a shared global word line MRAM structure
View Patent ↗A method of forming a shared global word line MRAM structure is disclosed. The method includes, etching a trench in an oxide layer formed over a substrate, depositing an first liner material, anisotropically etching the deposited first liner material leaving the first liner material on edges of the trench and physically contacting a bottom of the trench, depositing an magnetic metal liner material, anisotropically etching the deposited magnetic metal liner material leaving the magnetic metal liner material over the first liner material on edges of the trench, so that the magnetic metal liner extends to and physically contacts the bottom of the trench, depositing a conductive layer;, and chemically, mechanically polishing the conductive layer.
1. A method of forming a shared global word line MRAM structure, comprising:
etching a trench in an oxide layer formed over a substrate;
depositing an first liner material;
anisotropically etching the deposited first liner material leaving the first liner material on edges of the trench, and physically contacting a bottom of the trench;
depositing an magnetic metal liner material;
anisotropically etching the deposited magnetic metal liner material leaving the magnetic metal liner material over the first liner material on edges of the trench, so that the magnetic metal liner extends to and physically contacts the bottom of the trench;
depositing a conductive layer; and
chemically, mechanically polishing the conductive layer.
2. The method of forming a shared global word line MRAM structure of claim 1 , wherein the first liner material comprises tantalum.
3. The method of forming a shared global word line MRAM structure of claim 1 , wherein the magnetic metal liner material comprises at least one of Nickel, Chromium, Cobalt and Iron.
4. The method of forming a shared global word line MRAM structure of claim 1 , wherein the conductive layer comprises Copper.
5. The method of forming a shared global word line MRAM structure of claim 1 , wherein the conductive layer is deposited through chemical vapor deposition.
6. The method of forming a shared global word line MRAM structure of claim 1 , wherein the substrate comprises a first MRAM array.
7. The method of forming a shared global word line MRAM structure of claim 6 , further comprising forming a second MRAM array over the shared global word line.