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App. No. 10/657,207 · Confirmation No. 9107

Process of cleaning a semiconductor manufacturing system and method of manufacturing a semiconductor device

Inventor: Hiroomi Tsutae
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2009-08-04 ABN Abandonment 2 View
2009-01-22 CTFR Final Rejection 9 View
2009-01-22 892 List of references cited by examiner 1 View
2009-01-22 FWCLM Index of Claims 1 View
2009-01-22 SRFW Search information including classification, databases and other search related notes 1 View
2009-01-22 SRNT Examiner's search strategy and results 1 View
2008-10-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-10-29 CLM Claims 5 View
2008-10-29 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-10-29 XT/ Extension of Time 2 View
2008-10-29 WFEE Fee Worksheet (SB06) 1 View
2008-06-30 CTNF Non-Final Rejection 7 View
2008-06-30 892 List of references cited by examiner 1 View
2008-06-30 FWCLM Index of Claims 1 View
2008-06-30 SRFW Search information including classification, databases and other search related notes 1 View
2008-06-30 SRNT Examiner's search strategy and results 3 View
2008-06-30 1449 List of References cited by applicant and considered by examiner 1 View
2008-05-21 ELC. Response to Election / Restriction Filed 1 View
2008-05-01 CTRS Requirement for Restriction/Election 6 View
2008-05-01 FWCLM Index of Claims 1 View
2006-01-30 STATUS.LET Request for status of Application 1 View
2005-10-31 R251.RES Response providing copy of record for reconstruction 6 View
2005-10-31 DRW Drawings-only black and white line drawings 3 View
2005-10-17 R251.NTC Notice to provide a copy of an applicant's record under 37 CFR 1.251 to support the reconstruction of the application. 3 View
2005-08-11 LET. Miscellaneous Incoming Letter 1 View
2003-09-09 WFEE Fee Worksheet (SB06) 1 View
2003-09-09 WFEE Fee Worksheet (SB06) 1 View
2003-09-09 TRNA Transmittal of New Application 1 View
2003-09-09 SPEC Specification 21 View
2003-09-09 CLM Claims 5 View
2003-09-09 ABST Abstract 1 View
2003-09-09 DRW Drawings-only black and white line drawings 2 View
2003-09-09 OATH Oath or Declaration filed 6 View
2003-09-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-09-09 FRPR Certified Copy of Foreign Priority Application 1 View
2003-09-09 A.PE Preliminary Amendment 1 View
2003-09-09 CLM Claims 4 View
2003-09-09 REM Applicant Arguments/Remarks Made in an Amendment 1 View
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Quick Facts
App. No.
10/657,207
Filed
2003-09-09
Pub. No.
US20060040066A1
Examiner
AU, BAC H
Art Unit
2822