IP Library Granted Patent US 7,339,973
Granted Patent B2
US 7,339,973 · App. 10/672,182 · Granted Mar 4, 2008

Electrodes for fluorine gas discharge lasers

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Quick Facts
Patent No.
US 7,339,973
App. No.
10/672,182
Granted
Mar 4, 2008
Kind
B2
Abstract

Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.

Claims (85)

1. A gas discharge laser comprising a laser gas containing fluorine, comprising:

an elongated gas discharge electrode comprising:

an elongated electrode body having a centerline axis;

a pair of side walls on either side of the centerline axis;

a pair of end walls transverse to the centerline axis;

a crown straddling the centerline axis between the pair of side walls and, the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode;

a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.

2. The apparatus of claim 1 further comprising:

the second material is chose from a group of high erosion rate alloys.

3. The apparatus of claim 1 further comprising:

the second material is chosen from a group including materials comprising high zinc alloys, high tin alloys, glidcop, indium and aluminum.

4. The apparatus of claim 2 further comprising:

the second material is chosen from a group including materials comprising high zinc alloys, high tin alloys, glidcop, indium and aluminum.

5. The apparatus of claim 1 further comprising:

the first material comprising copper or copper alloy.

6. The apparatus of claim 2 further comprising:

the first material comprising copper or copper alloy.

7. The apparatus of claim 3 further comprising:

the first material comprising copper or copper alloy.

8. The apparatus of claim 4 further comprising:

the first material comprising copper or copper alloy.

9. The apparatus of claim 5 further comprising:

the first material is bonded to the second material by a process that creates a differential composition but single piece material.

10. The apparatus of claim 6 further comprising:

the first material is bonded to the second material by a process that creates a differential composition but single piece material.

11. The apparatus of claim 7 further comprising:

the first material is bonded to the second material by a process that creates a differential composition but single piece material.

12. The apparatus of claim 8 further comprising:

the first material is bonded to the second material by a process that creates a differential composition but single piece material.

13. The apparatus of claims 9 further comprising:

the first material is bonded t the second material by a process selected from the group of diffusing bonding, explosion bonding, cladding, ultrasonic welding and galvanizing.

14. The apparatus of claims 10 further comprising:

the first material is bonded t the second material by a process selected from the group of diffusing bonding, explosion bonding, cladding, ultrasonic welding and galvanizing.

15. The apparatus of claims 11 further comprising:

the first material is bonded t the second material by a process selected from the group of diffusing bonding, explosion bonding, cladding, ultrasonic welding and galvanizing.

16. The apparatus of claims 12 further comprising:

the first material is bonded t the second material by a process selected from the group of diffusing bonding, explosion bonding, cladding, ultrasonic welding and galvanizing.

17. The apparatus of claim 5 further comprising:

the high erosion regions are formed by creating a channel on either side of the crown and filling each channel with a molten form of the second material and machining the shape of the second material after it hardens.

18. The apparatus of claim 6 further comprising:

the high erosion regions are formed by creating a channel on either side of the crown and filling each channel with a molten form of the second material and machining the shape of the second material after it hardens.

19. The apparatus of claim 7 further comprising:

the high erosion regions are formed by creating a channel on either side of the crown and filling each channel with a molten form of the second material and machining the shape of the second material after it hardens.

20. The apparatus of claim 8 further comprising:

the high erosion regions are formed by creating a channel on either side of the crown and filling each channel with a molten form of the second material and machining the shape of the second material after it hardens.

21. The apparatus of claim 5 further comprising:

the high erosion regions comprise an annealed brass allow with a high zinc content.

22. The apparatus of claim 6 further comprising:

the high erosion regions comprise an annealed brass allow with a high zinc content.

23. The apparatus of claim 7 further comprising:

the high erosion regions comprise an annealed brass allow with a high zinc content.

24. The apparatus of claim 8 further comprising:

the high erosion regions comprise an annealed brass allow with a high zinc content.

25. The apparatus of claim 21 further comprising:

the annealed brass alloy is chosen from the group comprising:

C26000, C27000 and C28000.

26. The apparatus of claim 22 further comprising:

the annealed brass alloy is chosen from the group comprising:

C26000, C27000 and C28000.

27. The apparatus of claim 23 further comprising:

the annealed brass alloy is chosen from the group comprising:

C26000, C27000 and C28000.

28. The apparatus of claim 24 further comprising:

the annealed brass alloy is chosen from the group comprising:

C26000, C27000 and C28000.

29. The apparatus of claim 21 further comprising:

the annealed brass alloy is annealed at temperatures in excess of 1200 F.

30. The apparatus of claim 22 further comprising:

the annealed brass alloy is annealed at temperatures in excess of 1200 F.

31. The apparatus of claim 23 further comprising:

the annealed brass alloy is annealed at temperatures in excess of 1200 F.

32. The apparatus of claim 24 further comprising:

the annealed brass alloy is annealed at temperatures in excess of 1200 F.

33. The apparatus of claim 21 further comprising:

the annealed brass alloy comprises:

a thin film of zinc on the surface of the annealed brass alloy.

34. The apparatus of claim 22 further comprising:

the annealed brass alloy comprises:

a thin film of zinc on the surface of the annealed brass alloy.

35. The apparatus of claim 23 further comprising:

the annealed brass alloy comprises:

a thin film of zinc on the surface of the annealed brass alloy.

36. The apparatus of claim 24 further comprising:

the annealed brass alloy comprises:

a thin film of zinc on the surface of the annealed brass alloy.

Assignments (2)
MERGER Recorded Mar 10, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032397/0055 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2004
From: MORTON, RICHARD G.; MOOSMAN, BRYAN; DYER, TIMOTHY S.; CARMICHAEL, JAMES A.; ZHANG, JIPING
To: CYMER INC.
Reel/Frame 014610/0021 →