Method for burying resist and method for manufacturing semiconductor device
View Patent ↗A resist film is applied to an entire surface and subjected to patterning substantially in the same form as an opening to bury the resist film inside the opening. When a positive resist is used, a photomask having a light-shielding portion with an area smaller than the opening is used in patterning. When a negative resist is used, a photomask having a light transmitting portion with an area smaller than the opening is used.
1. A method for burying a resist comprising:
forming an interlayer film on a substrate;
forming an opening in said interlayer film;
applying a resist film to said interlayer film, including said opening; and
patterning said resist film substantially in the same form as said opening by exposing said resist with a photomask having a light-shielding portion or a light-transmitting portion substantially in the same form as said opening and developing said resist to remove said resist other than the resist in the opening, thereby burying said resist film inside of said opening.
2. The method for burying a resist according to claim 1 , wherein said resist is positive resist and including patterning said resist with a photomask having a light-shielding portion smaller in area than said opening.
3. The method for burying a resist according to claim 1 , wherein said resist is a negative resist and including patterning said resist with a photomask having a light-transmitting portion smaller in area than said opening.
4. A method for burying a resist comprising:
forming an interlayer film on a substrate;
forming an opening in said interlayer film;
forming a second film on said interlayer film including said opening;
applying a resist film to said second film; and
patterning said resist film substantially in the same form as said opening by exposing said resist with a photomask having a light-shielding portion or a light-transmitting portion substantially in the same form as said opening and developing said resist to remove said resist other than the resist in the opening, thereby burying said resist film inside of said opening.
5. The method for burying a resist according to claim 4 , wherein said resist is a positive resist and including patterning said resist with a photomask having a light-shielding portion smaller in area than said opening.
6. The method for burying a resist according to claim 4 , wherein said resist is a negative resist and including patterning said resist with a photomask having a light-transmitting portion smaller in area than said opening.
7. A method for manufacturing a semiconductor device comprising:
forming an interlayer film on a substrate;
forming an opening in said interlayer film;
applying a resist film to said interlayer film, including said opening;
patterning said resist film substantially in the same form as said opening by exposing said resist with a photomask having a light-shielding portion or a light-transmitting portion substantially in the same form as said opening and developing said resist to remove said resist other than the resist in the opening, thereby burying said resist film in said opening; and
etching said interlayer film while masking a bottom portion of said opening with said resist film buried in said opening.
8. A method for manufacturing a semiconductor device comprising:
forming an interlayer film on a substrate;
forming an opening in said interlayer film;
applying a second film on said interlayer film, including said opening;
applying a resist film on said second film; and
patterning said resist film substantially in the same form as said opening by exposing said resist with a photomask having a light-shielding portion or a light-transmitting portion substantially in the same form as said opening and developing said resist to remove said resist other than the resist in the opening, thereby burying said resist film in said opening; and
etching said second film while masking a bottom portion of said opening with said resist film buried in said opening.