Wiring structure, method of manufacturing the same, electro-optical device, and electronic device
The invention provides a wiring structure and a method for manufacturing the same for appropriately establishing an electrical connection between a first conductive layer constituting a part of a laminate and a conductive layer to be electrically connected thereto. The wiring structure can include, on a substrate, a capacitor provided with a first conductive layer, an insulating layer formed on the first conductive layer, and a second conductive layer formed on the insulating layer, a conductive layer electrically connected to the first conductive layer, and a relay layer located below the first conductive layer and the conductive layer, respectively to form a part of laminated structure. The first conductive layer and the conductive layer are electrically connected to each other through the relay layer.
1. An electro-optical device comprising, on a substrate, data lines extending along a first direction, scanning lines extending along a second direction intersecting the data lines, and pixel electrodes and thin film transistors arranged to correspond to intersection regions between the data lines and the scanning lines, the electro-optical device further comprising:
storage capacitors that are electrically coupled to the thin film transistors and the pixel electrodes; and
relay electrodes that are arranged below the pixel electrodes and the storage capacitors, respectively,
one electrode of a pair of electrodes constituting each storage capacitor being electrically coupled to the pixel electrode through the relay electrode.
2. The electro-optical device according to claim 1 , the storage capacitor being formed on a surface having a step.
3. The electro-optical device according to claim 1 , the one electrode being a pixel-potential-side capacitor electrode electrically coupled to the pixel electrode and the thin film transistor,
the storage capacitor comprising the pixel-potential-side capacitor electrode, a fixed-potential-side capacitor electrode arranged to face the pixel-potential-side capacitor electrode and having a fixed potential, and a dielectric film interposed between the pixel-potential-side capacitor electrode and the fixed-potential-side capacitor electrode; and
the dielectric film comprising a laminate including a layer made of a high dielectric material.
4. The electro-optical device according to claim 1 , the relay electrodes being formed using a same material as the gate electrodes of the thin film transistors included in the scanning lines.
5. The electro-optical device according to claim 1 , the fixed-potential-side capacitor electrode being formed to cover the pixel-potential-side capacitor electrode.
6. An electronic apparatus utilizing an electro-optical device according to claim 1 .