IP Library › Granted Patent US 6,784,426
Granted Patent Utility
US 6,784,426 · Confirmation No. 7942

ELECTRON BEAM IRRADIATION APPARATUS, ELECTRON BEAM EXPOSURE APPARATUS, AND DEFECT DETECTION METHOD

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2004-06-25 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-05-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-05 892 List of references cited by examiner 1 View
2004-05-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-05 FWCLM Index of Claims 1 View
2004-05-05 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-01 SRNT Examiner's search strategy and results 4 View
2004-04-29 SRNT Examiner's search strategy and results 3 View
2003-10-16 TRNA Transmittal of New Application 2 View
2003-10-16 SPEC Specification 31 View
2003-10-16 CLM Claims 12 View
2003-10-16 ABST Abstract 1 View
2003-10-16 DRW Drawings-only black and white line drawings 5 View
2003-10-16 OATH Oath or Declaration filed 3 View
2003-10-16 FRPR Certified Copy of Foreign Priority Application 38 View
2003-10-16 WFEE Fee Worksheet (SB06) 1 View
2003-10-16 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,784,426
App. No.
10/686,792
Filed
2003-10-16
Granted
2004-08-31
Pub. No.
US20040079883A1
Art Unit
2881
PTA
0 days