Low surface energy templates
The present invention pertains to disposing a diamond-like composition on a template, wherein the diamond-like composition acts as a release layer. The diamond-like composition is substantially transparent to actinic radiation, e.g., ultraviolet (UV) light, and will also have a desired surface energy, wherein the desired surface energy minimizes adhesion between the template and an underlying material disposed on a substrate. The diamond-like composition is characterized with a low surface energy that exhibits desirable release characteristics.
1 . A method of creating a template, said method comprising:
disposing a diamond-like composition on a surface of said template having properties sufficient to be substantially transmissive of a predetermined wavelength and provide said surface.
2 . The method as recited in claim 1 wherein disposing further includes disposing said diamond-like composition from a set of diamond-like compositions consisting of including diamond-like carbon (DLC) and diamond-like nano-composites.
3 . The method as recited in claim 2 wherein said nano-composites includes DYLYN®.
4 . The method as recited in claim 1 wherein said predetermined wavelength includes UV light.
5 . The method as recited in claim 1 where disposing further includes patterning said diamond-like composition.
6 . The method as recited in claim 1 further including doping said diamond-like composition with electrically conductive elements.
7 . The method as recited in claim 1 further including depositing an electrically conductive layer upon said substrate before depositing said diamond-like composition.
8 . The method as recited in claim 1 further including depositing an electrically conductive layer upon said substrate before depositing said diamond-like composition and patterning said diamond-like composition to selectively expose regions of said electrically conductive layer.
9 . The method as recited in claim 1 further including forming said template from a fused-silica.
10 . A method of creating a template, said method comprising:
disposing a diamond-like composition on a surface of said template having properties sufficient to be substantially transmissive of a predetermined wavelength and provide said surface with a predetermined surface energy; and
patterning said diamond-like composition to includes a plurality of protrusions and recesses.
11 . The method as recited in claim 10 wherein disposing further includes disposing said diamond-like composition from a set of diamond-like compositions consisting of including diamond-like carbon (DLC) and DYLYN®.
12 . The method as recited in claim 10 wherein said predetermined wavelength includes UV light.
13 . The method as recited in claim 10 further including doping said diamond-like composition with electrically conductive elements.
14 . The method as recited in claim 10 further including depositing an electrically conductive layer upon said substrate before depositing said diamond-like composition.
15 . The method as recited in claim 10 wherein patterning further includes said diamond-like composition to selectively expose regions of said electrically conductive layer.
16 . A method of creating a template, said method comprising:
forming an electrically conductive layer on said template having properties to be substantially transmissive of a predetermined wavelength;
disposing a diamond-like composition on a surface of said template having properties sufficient to be substantially transmissive of said predetermined wavelength and provide said surface with a predetermined surface energy; and
patterning said diamond-like composition to includes a plurality of protrusions and recesses and selective expose portions of said electrically conductive layer.
17 . The method as recited in claim 16 wherein disposing further includes disposing said diamond-like composition from a set of diamond-like compositions consisting of including diamond-like carbon (DLC) and DYLYN®.
18 . The method as recited in claim 16 wherein said predetermined wavelength includes UV light.
19 . The method as recited in claim 16 further including depositing an electrically conductive layer upon said substrate before depositing said diamond-like composition.
20 . A template for use in imprint lithography, said template comprising:
a body;
a diamond-like composition disposed on said body, with said diamond-like composition being substantially transparent to a predetermined wavelength of light and having a predetermined surface energy associated therewith.
21 . The template as recited in claim 20 wherein said diamond-like composition is electrically conductive.
22 . The template as recited in claim 20 wherein said diamond-like composition includes a plurality of protrusions and recesses.
23 . The template as recited in claim 20 further including an electrically conductive layer position between said body and said diamond-like composition.
24 . The template as recited in claim 22 wherein said diamond-like composition includes a plurality of protrusions and recesses, with said electrically conductive layer being exposed in said recesses.
25 . The template as recited in claim 22 wherein said electrically conductive layer formed from Indium Tin Oxide.