Magnetic sensor and position detector
In a magnetic sensor ( 1 ) including a substrate ( 10 ) having a magnetism-sensitive element ( 11 ) formed thereon, a hard membrane ( 14 ) is formed on the outermost surface, an organic film ( 13 ) to relieve the stress caused by the hard membrane ( 14 ) is formed under the hard membrane ( 14 ), and an inorganic film ( 12 ) to relieve the stress caused by the organic film ( 13 ) is formed between the organic film ( 13 ) and magnetism-sensitive element ( 11 ). Also, an intermediate film formed from an element having a large force of bonding to carbon may be formed between the organic film ( 13 ) and hard membrane ( 14 ). Thus, the magnetic sensor (MR sensor, for example) can be protected against an external shock.
1. A magnetic sensor including a substrate having a magnetism-sensitive element formed thereon and which detects a magnetic signal from a medium having magnetic signals recorded thereon, the magnetic sensor having:
an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm;
an organic film formed on the inorganic film; and
a membrane formed on the organic film,
wherein said magnetic sensor has said membrane disposed opposite to the medium, and relatively moves along said medium.
2. The magnetic sensor as set forth in claim 1 , wherein the membrane is of amorphous carbon hydride (will be referred to as “DLC film” hereinafter).
3. The magnetic sensor as set forth in claim 1 , wherein the inorganic film comprises a nitride film.
4. The magnetic sensor as set forth in claim 1 , having an intermediate film formed between the organic film and the membrane.
5. The magnetic sensor as set forth in claim 4 , wherein the intermediate film has mixed therein any one or more of Si, Ti, Cr, W and Ta wherein the one or more of Si, Ti, Cr, W and Ta bond with carbon.
6. The magnetic sensor as set forth in claim 4 , wherein the intermediate film is formed from Si, C, O and H.
7. The magnetic sensor as set forth in claim 4 , wherein the boundary between the intermediate film and the membrane has a structure in which the components vary continuously.
8. A position detector comprising:
a magnetic scale with position signals longitudinally provided thereon; and
a magnetic sensor including a substrate having a magnetism-sensitive element formed thereon, an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm, an organic film formed on the inorganic film, and a membrane formed on the organic film;
wherein said magnetic sensor has said membrane disposed opposite to the magnetic scale, and relatively moves along the magnetic scale to detect position signals provided on the magnetic scale.
9. The position detector as set forth in claim 8 , wherein the membrane is of amorphous carbon hydride (will be referred to as “DLC film” hereinafter).
10. The position detector as set forth in claim 8 , wherein the inorganic film comprises a nitride film.
11. The position detector as set forth in claim 8 , having an intermediate film formed between the organic film and the membrane.
12. The position detector as set forth in claim 11 , wherein the intermediate film has mixed therein any one or more of Si, Ti, Cr, W and Ta wherein the one or more of Si, Ti, Cr, W and Ta bond with carbon.
13. The position detector as set forth in claim 11 , wherein the intermediate film is formed from Si, C, O and H.
14. The position detector as set forth in claim 11 , wherein the boundary between the intermediate film and the membrane has a structure in which the components vary continuously.
15. A magnetic sensor including a substrate having a magnetism-sensitive element formed thereon and which detects a magnetic signal from a medium having magnetic signals recorded thereon, the magnetic sensor having:
an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm;
an organic film formed on the inorganic film; and
an amorphous carbon hydride membrane formed on the organic film to a thickness of 0.1 μm to 5 μm,
wherein said magnetic sensor has said amorphous carbon hydride membrane disposed opposite to the medium, and moves relatively along said medium.
16. The magnetic sensor as set forth in claim 15 , wherein the inorganic film comprises a nitride film.
17. A magnetic sensor including a substrate having a magnetism-sensitive element formed thereon and which detects a magnetic signal from a medium having magnetic signals recorded thereon, the magnetic sensor having:
an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm;
an organic film formed on the inorganic film;
an intermediate film formed on the organic film; and
a membrane formed on the intermediate film to a thickness of 0.1 μm to 5 μm
wherein said magnetic sensor has said membrane disposed opposite to the medium, and moves relatively along said medium.
18. The magnetic sensor as set forth in claim 17 , wherein said membrane is formed from the group consisting of diamond-like carbon, TiN, CrN, SiC, Al 2 O 3 and AlN.
19. The magnetic sensor as set forth in claim 17 , wherein the inorganic film comprises a nitride film.
20. A position detector comprising:
a magnetic scale with position signals longitudinally provided thereon; and
a magnetic sensor including a substrate having a magnetism-sensitive element formed thereon, an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm, an organic film formed on the inorganic film, and an amorphous carbon hydride membrane formed on the organic film to a thickness of 0.1 μm to 5 μm;
wherein said magnetic sensor has said amorphous carbon hydride membrane disposed opposite to the magnetic scale, and moves relatively along the magnetic scale to detect position signals provided on the magnetic scale.
21. The position detector as set forth in claim 20 , wherein the inorganic film comprises a nitride film.
22. A position detector comprising:
a magnetic scale with position signals longitudinally provided thereon; and
a magnetic sensor including a substrate having a magnetism-sensitive element formed thereon, an inorganic film formed on the magnetism-sensitive element to a thickness between 100 nm to 3000 nm, an organic film formed on the inorganic film, an intermediate film formed on the organic film and a membrane formed on the intermediate film to a thickness of 0.1 μm to 5 μm;
wherein said magnetic sensor has said membrane disposed opposite to the magnetic scale, and moves relatively along the magnetic scale to detect position signals provided on the magnetic scale.
23. The position detector as set forth in claim 22 , wherein said membrane is formed from the group consisting of diamond-like carbon, TiN, CrN, SiC, Al 2 O 3 and AlN.
24. The position detector as set forth in claim 22 , wherein the inorganic film comprises a nitride film.