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App. No. 10/692,093 · Confirmation No. 8299

Method of second step polishing in copper CMP with a polishing fluid containing no oxidizing agent

Inventor: Jinru Bian
Expressly Abandoned -- During Examination View Publication ↗
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2008-10-09 ABN Abandonment 2 View
2008-10-02 EABN Letter Express Abandonment of the application 2 View
2008-07-08 NRES Letter Restarting Period for Response (i.e. Letter re: References) 11 View
2008-04-22 PET.DEC.TC Petition decision routed to the Technology Center to act on the decision or continue prosecution 2 View
2007-08-09 LET. Miscellaneous Incoming Letter 1 View
2007-08-08 PET.OP Petition for review by the Office of Petitions 4 View
2007-08-06 ABN Abandonment 2 View
2007-01-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-07-07 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-05-15 RETMAIL Mail returned to USPTO as undelivered 11 View
2006-05-05 CTNF Non-Final Rejection 10 View
2006-05-05 SRFW Search information including classification, databases and other search related notes 1 View
2006-04-20 SRNT Examiner's search strategy and results 1 View
2006-03-10 RCEX Request for Continued Examination (RCE) 2 View
2006-03-10 WFEE Fee Worksheet (SB06) 1 View
2006-03-10 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-03-10 WFEE Fee Worksheet (SB06) 1 View
2006-02-27 CTAV Advisory Action (PTOL-303) 3 View
2006-02-09 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2006-02-09 CLM Claims 2 View
2006-02-09 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-02-09 WFEE Fee Worksheet (SB06) 1 View
2005-12-15 CTFR Final Rejection 10 View
2005-12-15 892 List of references cited by examiner 1 View
2005-12-15 SRFW Search information including classification, databases and other search related notes 1 View
2005-12-12 SRNT Examiner's search strategy and results 1 View
2005-10-11 WFEE Fee Worksheet (SB06) 1 View
2005-10-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-10-04 SPEC Specification 1 View
2005-10-04 CLM Claims 2 View
2005-10-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-07-12 CTNF Non-Final Rejection 9 View
2005-07-12 1449 List of References cited by applicant and considered by examiner 2 View
2005-07-12 892 List of references cited by examiner 1 View
2005-07-12 SRFW Search information including classification, databases and other search related notes 1 View
2005-07-12 BIB Bibliographic Data Sheet 1 View
2005-06-24 SRNT Examiner's search strategy and results 3 View
2005-04-07 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2005-04-07 FOR Foreign Reference 30 View
2004-02-27 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-22 TRNA Transmittal of New Application 2 View
2003-10-22 SPEC Specification 8 View
2003-10-22 CLM Claims 2 View
2003-10-22 ABST Abstract 1 View
2003-10-22 WFEE Fee Worksheet (SB06) 1 View
2003-10-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/692,093
Filed
2003-10-22
Pub. No.
US20050090106A1
Art Unit
1792