Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement
A gas-using facility including a portable dry scrubber system and/or over-pressure control arrangement. The portable dry scrubber system is of a unitary modular form, accommodating transport and ready set-up, take-down, and redeployment in the process facility. The over-pressure control arrangement provides capability for release of over-pressure gas from a compressed gas storage vessel during an over-pressure event, e.g., overheating of a compressed gas cylinder during a semiconductor foundry fire, while avoiding the bulk release of the entire vessel contents that occurs when conventional pressure relief devices are employed.
1 . A gas-using facility including a portable dry scrubber system and/or over-pressure control system for controllably venting over-pressure gas from a compressed gas storage vessel operatively connected in gas-supplying relationship to the gas-using facility and terminating venting when pressure in the compressed gas storage vessel has been reduced to a predetermined pressure below the burst pressure of the vessel.
2 . The gas-using facility of claim 1 , comprising a semiconductor manufacturing facility.
3 . The gas-using facility of claim 1 , including said portable dry scrubber system.
4 . The gas-using facility of claim 3 , wherein the portable dry scrubber system comprises a unitary modular apparatus including a chamber having at least one bed of scrubbing material therein for contacting with an effluent gas produced by the facility, to remove scrubbable components from the effluent gas.
5 . The gas-using facility of claim 4 , wherein the chamber comprises at least one inlet port and at least one discharge port for flow of gas therethrough, and said ports have associated therewith quick-connect/quick-disconnect couplings.
6 . The gas-using facility of claim 4 , wherein the chamber comprises process control means associated therewith.
7 . The gas-using facility of claim 4 , wherein the portable dry scrubber system comprises motive transport means for translation of the system.
8 . The gas-using facility of claim 4 , wherein the chamber has a volume of scrubbing material therein that is in a range of from about 0.1 to about 10 gallons.
9 . The gas-using facility of claim 4 , wherein the chamber has a vertically upstanding shape, and is arranged for vertical upward flow of gas therethrough.
10 . The gas-using facility of claim 9 , wherein the chamber is cylindrical, cubic or rectangular in form.
11 . The gas-using facility of claim 4 , wherein the chamber is sized to accommodate a flow therethrough of gas in a range of from about 0.1 to about 35 standard cubic feet per minute.
12 . The gas-using facility of claim 4 , wherein the scrubbing material comprises a sorbent material selected from the group consisting of CuO, CuCO 3 , Cu(OH) 2 , NiO, Na 2 O, ZnO, Fe 2 O 3 , Ca(OH) 2 , LiOH, KOH, MnO, CoO, AgO, and combinations of two or more of the foregoing.
13 . The gas-using facility of claim 4 , wherein the portable dry scrubber system has a footprint in a range of about 0.01 to about 4 square feet.
14 . The gas-using facility of claim 4 , wherein the portable dry scrubber comprises a viewport having a colorimetric indicator element therein to show a color change indicative of breakthrough of a contaminant gas species from the bed of scrubbing material.
15 . A portable dry scrubber system comprising a unitary modular apparatus including a chamber having at least one bed of scrubbing material therein for contacting a gas containing at least one scrubbable component therein, to remove said at least one scrubbable component from the gas.
16 . The portable dry scrubber system of claim 15 , wherein the chamber comprises at least one inlet port and at least one discharge port for flow of gas therethrough, and said ports have associated therewith quick-connect/quick-disconnect couplings.
17 . The portable dry scrubber system of claim 15 , wherein the chamber comprises process control means associated therewith.
18 . The portable dry scrubber system of claim 15 , comprising motive transport means for translation of the system.
19 . The portable dry scrubber system of claim 15 , wherein the chamber has a volume of scrubbing material therein that is in a range of from about 0.1 to about 10 gallons.
20 . The portable dry scrubber system of claim 15 , wherein the chamber has a vertically upstanding shape, and is arranged for vertical upward flow of gas therethrough.
21 . The portable dry scrubber system of claim 15 , wherein the chamber is sized to accommodate a flow therethrough of gas in a range of from about 0.1 to about 35 standard cubic feet per minute.
22 . The portable dry scrubber system of claim 15 , wherein the scrubbing material comprises a sorbent material selected from the group consisting of CuO, CuCO 3 , Cu(OH) 2 , NiO, Na 2 O, ZnO, Fe 2 O 3 , Ca(OH) 2 , LiOH, KOH, MnO, CoO, AgO, and combinations of two or more of the foregoing.
23 . The portable dry scrubber system of claim 15 , having a footprint in a range of from about 0.01 to about 4 square feet.
24 . The portable dry scrubber system of claim 15 , comprising a viewport having a colorimetric indicator element therein to show a color change indicative of breakthrough of a contaminant gas species from the bed of scrubbing material.
25 . An over-pressure control system for controllably venting over-pressure gas from a compressed gas storage vessel operatively connected in gas-supplying relationship to a gas-using facility and terminating venting when pressure in the compressed gas storage vessel has been reduced to a predetermined pressure below the burst pressure of the vessel.
26 . The over-pressure control system of claim 25 , wherein the vented over-pressure gas is flowed to an abatement system comprises a dry scrubber unit including a scrubbing material having sorptive affinity for the over-pressure gas.
27 . The over-pressure control system of claim 25 , comprising a failure element arranged to fail at a predetermined failure pressure.
28 . The over-pressure control system of claim 25 , wherein the failure element comprises a burst disk.