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App. No. 10/695,804 · Confirmation No. 6877

METHOD FOR FABRICATING METAL INTERCONNECT IN A CARBON-CONTAINING SILICON OXIDE FILM

Inventor: Hiroshi Yuasa
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
10/695,804
Filed
2003-10-30
Granted
2004-11-09
Pub. No.
US20040097068A1
Examiner
MAI, ANH D
Art Unit
2814
PTA
0 days