Method for forming metal interconnect in a carbon containing silicon oxide film
View Patent ↗An insulating film is formed of a carbon-containing silicon dioxide film on a semiconductor substrate. In the insulating film, an interconnect groove is formed. A silicon dioxide layer with a density high enough to allow almost no oxygen to pass therethrough is formed on the bottom and side faces of the interconnect groove. And a metal interconnect is formed on the silicon dioxide layer inside the interconnect groove.
1. A method for forming a semiconductor device, comprising the steps of:
a) forming an insulating film of a carbon-containing silicon oxide film over a substrate;
b) etching the insulating film using a resist pattern as a mask, thereby forming an interconnect groove in the insulating film;
c) filling the interconnect groove with a resist film;
d) performing an etching process, thereby removing a first region of the resist film, existing outside the interconnect groove, and the resist, pattern,
e) removing a second region of the resist film, still existing inside the interconnect groove,
f) depositing a metal film on the interconnect groove,
g) filling the interconnect grove with the metal, followed by removing metal film outside the interconnect and a surface film of the insulating film.
2. The method of claim 1 , further comprising a step of forming the surface film on the insulating film when the second region of the resist film inside the interconnect groove is removed.
3. The method of claim 1 , wherein the etching process uses an etching gas containing oxygen.
4. The method of claim 1 , wherein the etching process is carried out by a down flow technique in a vacuum of 13.3 Pa or less.
5. The method of claim 1 , wherein the metal film is made up of a barrier metal layer and a main interconnect layer.
6. The method of claim 5 , wherein the barrier metal is a tantalum nitride and the main interconnect layeris copper.