IP Library Granted Patent US 7,806,168
Granted Patent B2
US 7,806,168 · App. 10/698,180 · Granted Oct 5, 2010

Optimal spreader system, device and method for fluid cooled micro-scaled heat exchange

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Quick Facts
Patent No.
US 7,806,168
App. No.
10/698,180
Granted
Oct 5, 2010
Kind
B2
Abstract

A device, method, and system for a fluid cooled micro-scaled heat exchanger is disclosed. The fluid cooled micro-scaled heat exchanger utilizes a micro-scaled region and a spreader region with a highly thermally conductive material and sized to yield high heat dissipation and transfer area per unit volume from a heat source. The micro-scaled region preferably comprises microchannels.

Claims (102)

1. A device for fluid cooled micro-scaled heat exchange, the device comprising:

a plurality of substantially parallel micro-scaled regions having a fluid inlet side and a fluid outlet side configured to permit flow of fluid therethrough;

a plurality of inlet channels, interleaved between the micro-scaled regions and coupled to the fluid inlet side of each micro-scaled region, wherein a direction of fluid flow at the inlet side in adjacent micro-scaled regions is in substantially opposite directions;

a plurality of outlet channels, interleaved between the micro-scaled regions and coupled to the fluid outlet side of each micro-scaled region, wherein the direction of fluid flow at the outlet side in adjacent micro-scaled regions is in substantially opposite directions; and

a spreader region, wherein the spreader region comprises a first side and a second side, wherein the first side is positioned on and coupled to a heat source, and wherein the second side is coupled to the plurality of micro-scaled regions.

2. The device in claim 1 , wherein the spreader region comprises a thickness dimension within the range of and including 0.3 millimeter to 1.0 millimeters.

3. The device in claim 1 , wherein the spreader region and the micro-scaled regions are both wider than the heat source defining an overhang of the heat source, and wherein the plurality of micro-scaled regions overlay the heat source.

4. The device in claim 3 , wherein the overhang of the micro-scaled regions is in the range of and including 0.0 millimeters to 15.0 millimeters.

5. The device in claim 1 , wherein the micro-scaled regions comprise microchannels, wherein the microchannels comprise walls.

6. The device in claim 5 , wherein at least one of the microchannel walls has a width dimension within a range of and, including 10 microns to 100 microns.

7. The device in claim 5 , wherein at least one of the microchannel walls has a height dimension within a range of and including 50 microns and 2.0 millimeters.

8. The device in claim 5 , wherein at least two of the microchannel walls are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

9. The device in claim 1 , wherein the micro-scaled regions comprise a micro-porous structure.

10. The device in claim 9 , wherein the micro-porous structure comprises a porous material with a porosity within a range of and including 50 to 80 percent.

11. The device in claim 9 , wherein the micro-porous structure has an average pore size within a range of and including 10 microns to 200 microns.

12. The device in claim 9 , wherein the micro-porous structure comprises a height within a range of and including 0.25 millimeter to 2.0 millimeters.

13. The device in claim 1 , wherein the micro-scaled regions comprise micro-pillars.

14. The device in claim 13 , wherein the micro-pillars comprise a plurality of pins, wherein at least one of the plurality of pins has a Cross sectional area within a range of and including 10 (micron) 2 and 100 (micron) 2 .

15. The device in claim 14 , wherein at least one of the plurality of pins has a height dimension within a range of and including 50 microns and2.0 millimeters.

16. The device in claim 14 , wherein at least two of the plurality of pins are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

17. The device in claim 1 , wherein the micro-scaled regions comprise any one of microchannels, a micro-porous structure, and micro-pillars.

18. The device in claim 1 , wherein the micro-scaled regions comprise silicon.

19. The device in claim 1 , wherein the micro-scaled regions comprise a material with thermal conductivity larger than 25 W/m-K.

20. The device in claim 1 , wherein the micro-scaled regions comprise a high aspect ratio micro-machined material.

21. The device in claim 1 , wherein the micro-scaled regions comprise semiconducting material.

22. The device in claim 1 , wherein the micro-scaled regions comprise precision machined metals.

23. The device in claim 1 , wherein the micro-scaled regions comprise precision machined alloys.

24. The device in claim 1 , wherein the spreader region comprises a material with a thermal conductivity value larger than 120 W/m-K.

25. The device in claim 1 , wherein the spreader region is interposed between the micro-scaled regions and the heat source.

26. The device in claim 1 , wherein the spreader region comprises copper.

27. The device in Claim 1 , wherein the spreader region comprises diamond.

28. The device in claim 1 , wherein the spreader region comprises silicon carbide.

29. The device in claim 1 , wherein the heat source is a microprocessor.

30. The device in claim 1 , further comprising a plurality of manifolding layers coupled to the spreader region.

31. The device in claim 30 , wherein the plurality of manifolding layers comprise interwoven manifolds.

32. The device in claim 31 , wherein the plurality of manifolding layers further comprise a plurality of individualized holes for channeling fluid into and out of the device.

33. The device in claim 1 , further comprising a plurality of manifolding layers coupled to the micro-scaled regions.

34. The device in claim 33 , wherein the plurality of manifolding layers comprise interwoven manifolds.

35. The device in claim 33 , wherein the plurality of manifolding layers further comprise a plurality of individualized holes for channeling fluid into and out of the device.

36. The device in claim 1 , further comprising a plurality of fluid paths coupled to the micro-scaled regions, wherein the plurality of fluid paths are configured to receive fluid and permit the flow of fluid therethrough.

37. The device in claim 1 , wherein the heat source, the spreader region, and the micro-scaled regions are in a monolithic configuration.

38. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by an anodic bonding method.

39. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by a fusion bonding method.

40. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by a eutectic bonding method.

41. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by an adhesive bonding method.

42. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by a brazing method.

43. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by a welding method.

44. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by a soldering method.

45. The device in claim 1 , wherein the micro-scaled regions and the spreader region are coupled by an epoxy method.

46. The device in claim 1 , wherein the fluid comprises water.

47. The device in claim 1 , wherein the fluid comprises any one of water, ethylene glycol, isopropyl alcohol, ethanol, methanol, and hydrogen peroxide.

48. A device for fluid cooled micro-scaled heat exchange comprising:

a plurality of substantially parallel micro-scaled regions having a fluid inlet side and a fluid outlet side configured to permit flow of fluid therethrough, wherein each of the micro-scaled regions has a first width, and a thickness;

a plurality of inlet channels, interleaved between the micro-scaled regions and coupled to the fluid inlet side of each micro-scaled region, wherein a direction of fluid flow at the inlet side in adjacent micro-scaled regions is in substantially opposite directions;

a plurality of outlet channels, interleaved between the micro-scaled regions and coupled to the fluid outlet side of each micro-scaled region, wherein the direction of fluid flow at the outlet side in adjacent micro-scaled regions is in substantially opposite directions; and

a spreader region with a second width and a thickness, wherein the spreader region comprises a first side coupled to a heat source having a heat source width and a second side coupled to the plurality of micro-scaled regions.

49. The device in claim 48 , wherein the heat source, the spreader region, and the micro-scaled regions are in a monolithic configuration.

50. The device in claim 48 , wherein the spreader region and the micro-scaled regions are both wider than the heat source defining an overhang of the heat source, and wherein the plurality of micro-scaled regions overlay the heat source.

51. The device in claim 50 , wherein the overhang of the micro-scaled regions is in a range of and including 0.0 millimeters to 15.0 millimeters.

52. The device in claim 48 , wherein the micro-scaled regions comprise microchannels, wherein the microchannels comprise walls.

53. The device in claim 52 , wherein at least one of the microchannel walls has a width dimension within a range of and including 10 microns to 100 microns.

54. The device in claim 52 , wherein at least one of the microchannel walls has a height dimension within a range of and including 50 microns and 2.0 millimeters.

55. The device in claim 52 , wherein at least two of the microchannel walls are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

56. The device in claim 48 , wherein the micro-scaled regions comprise a micro-porous structure.

57. The device in claim 56 , wherein the micro-porous structure comprises a porous material with a porosity within a range of and including 50 to 80 percent.

58. The device in claim 56 , wherein the micro-porous structure has an average pore size within a range of and including 10 microns to 200 microns.

59. The device in claim 56 , wherein the micro-porous structure comprises a height within a range of and including 0.25 millimeter to 2.0 millimeters.

60. The device in claim 48 , wherein the micro-scaled regions comprise micro-pillars.

61. The device in claim 60 , wherein the micro-pillars comprise a plurality of pins, wherein at least one of the plurality of pins has a cross sectional area within a range of and including 10 (micron) 2 and 100 (micron) 2 .

62. The device in claim 61 , wherein at least one of the plurality of pins has a height dimension within a range of and including 50 microns and 2.0 millimeters.

63. The device in claim 61 , wherein at least two of the plurality of pins are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

64. The device in claim 48 , wherein the micro-scaled regions comprise any one of microchannels, a micro-porous structure, and micro-pillars.

65. The device in claim 48 , wherein the heat source is a microprocessor.

66. The device in claim 48 , wherein the micro-scaled regions width is greater than the heat source width.

67. The device in claim 48 , wherein the first width is greater than the heat source width and the first width is substantially centered over the heat source width.

68. The device in claim 67 , wherein the difference between the first width and the heat source width is in a range of 0.0 millimeter to 15 millimeters.

69. The device in claim 67 , wherein the difference between the first width and the heat source width is in a range of 0.0 millimeter to 5.0 millimeters on each side of the heat source when the fluid is single phase.

70. The device in claim 67 , wherein the difference between the first width and the heat source width is in a range of 5.0 millimeter -15 millimeters on each side of the heat source when the fluid is two phase.

71. The device in claim 48 , wherein the first side further comprises a higher thermal conductivity region coupled to the heat source.

72. The device in claim 48 , wherein the spreader region is interposed between the heat source and the micro-scaled regions.

73. The device in claim 48 , wherein the spreader region comprises copper.

74. The device in claim 48 , wherein the spreader region comprises diamond.

75. The device in claim 48 , wherein the spreader region comprises silicon carbide.

76. A system for fluid cooled micro-scaled heat exchange comprising:

means for spreading heat having a width and forming a spreader region, wherein the means for spreading heat is coupled to a heat source;

means for supplying fluids; and

means for micro-scaled fluid flow through a plurality of substantially parallel micro-scaled regions configured to receive fluid from the means for supplying fluid, wherein the means for micro-scaled fluid flow produces a fluid flow that is in substantially opposing directions for adjacent micro-scaled regions, and wherein the means for micro-scaled fluid flow is coupled to the means for spreading heat.

77. The device in claim 76 , wherein the spreader region and the micro-scaled regions are both wider than the heat source defining an overhang of the heat source.

78. The device in claim 77 , wherein the overhang of the micro-scaled regions is in a range of and including 0.0 millimeters to 15.0 millimeters.

79. The device in claim 76 , wherein the micro-scaled regions comprise microchannels, wherein the microchannels comprise walls.

80. The device in claim 79 , wherein at least one of the microchannel walls has a width dimension within a range of and including 10 microns to 100 microns.

81. The device in claim 79 , wherein at least one of the microchannel walls has a height dimension within a range of and including 50 microns and 2.0 millimeters.

82. The device in claim 79 , wherein at least two of the microchannel walls are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

83. The device in claim 76 , wherein the micro-scaled regions comprise a micro-porous structure.

84. The device in claim 83 , wherein the micro-porous structure comprises a porous material with a porosity within a range of and including 50 to 80 percent.

85. The device in claim 83 , wherein the micro-porous structure has an average pore size within a range of and including 10 microns to 200 microns.

86. The device in claim 83 , wherein the micro-porous structure comprises a height within a range of and including 0.25 millimeter to 2.0 millimeters.

87. The device in claim 76 , wherein the micro-scaled regions comprise micro-pillars.

88. The device in claim 87 , wherein the micro-pillars comprise a plurality of pins, wherein at least one of the plurality of pins has a cross sectional area within a range of and including 10 (micron) 2 and 100 (micron) 2 .

89. The device in claim 88 , wherein at least one of the plurality of pins has a height dimension within a range of and including 50 microns and 2.0 millimeters.

90. The device in claim 88 , wherein at least two of the plurality of pins are separated from each other by a spacing dimension within a range of and including 10 microns to 150 microns.

91. The device in claim 76 , wherein the micro-scaled regions comprise any one of microchannels, a micro-porous structure, and micro-pillars.

Assignments (10)
SECURITY INTEREST Recorded Oct 26, 2021
From: VERTIV CORPORATION; VERTIV IT SYSTEMS, INC.; ELECTRICAL RELIABILITY SERVICES, INC.; ENERGY LABS, INC.
To: UMB BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 057923/0782 →
SECURITY AGREEMENT Recorded Mar 3, 2020
From: ELECTRICAL RELIABILITY SERVICES, INC.; ENERGY LABS, INC.; VERTIV CORPORATION; VERTIV IT SYSTEMS, INC.
To: CITIBANK, N.A.
Reel/Frame 052076/0874 →
RELEASE OF SECURITY INTEREST Recorded Mar 2, 2020
From: JPMORGAN CHASE BANK, N.A.
To: VERTIV IT SYSTEMS, INC. (F/K/A AVOCENT CORPORATION); VERTIV IT SYSTEMS, INC. (F/K/A AVOCENT HUNTSVILLE, LLC); VERTIV IT SYSTEMS, INC. (F/K/A AVOCENT REDMOND CORP.); VERTIV CORPORATION (F/K/A EMERSON NETWORK POWER, ENERGY SYSTEMS, NORTH AMERICA, INC.); VERTIV CORPORATION (F/K/A LIEBERT CORPORATION); VERTIV IT SYSTEMS, INC. (F/K/A AVOCENT FREMONT, LLC)
Reel/Frame 052065/0757 →
RELEASE OF SECURITY INTEREST Recorded Mar 2, 2020
From: THE BANK OF NEW YORK MELLON TRUST COMPANY N.A.
To: VERTIV CORPORATION; VERTIV IT SYSTEMS, INC.; ELECTRICAL RELIABILITY SERVICES, INC.
Reel/Frame 052071/0913 →
SECOND LIEN SECURITY AGREEMENT Recorded Jun 10, 2019
From: VERTIV IT SYSTEMS, INC.; VERTIV CORPORATION; VERTIV NORTH AMERICA, INC.; ELECTRICAL RELIABILITY SERVICES, INC.; VERTIV ENERGY SYSTEMS, INC.
To: THE BANK OF NEW YORK MELLON TRUST COMPANY, N.A.
Reel/Frame 049415/0262 →
CHANGE OF NAME Recorded Dec 7, 2018
From: LIEBERT CORPORATION
To: VERTIV CORPORATION
Reel/Frame 047749/0820 →
ABL SECURITY AGREEMENT Recorded Mar 6, 2017
From: ASCO POWER TECHNOLOGIES, L.P.; AVOCENT CORPORATION; AVOCENT FREMONT, LLC; AVOCENT HUNTSVILLE, LLC; AVOCENT REDMOND CORP.; EMERSON NETWORK POWER, ENERGY SYSTEMS, NORTH AMERICA, INC.; LIEBERT CORPORATION; LIEBERT NORTH AMERICA, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 041941/0363 →
SECURITY AGREEMENT Recorded Mar 2, 2017
From: ASCO POWER TECHNOLOGIES, L.P.; AVOCENT CORPORATION; AVOCENT FREMONT, LLC; AVOCENT HUNTSVILLE, LLC; AVOCENT REDMOND CORP.; EMERSON NETWORK POWER, ENERGY SYSTEMS, NORTH AMERICA, INC.; LIEBERT CORPORATION; LIEBERT NORTH AMERICA, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 041944/0892 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 7, 2016
From: COOLIGY, INC.
To: LIEBERT CORPORATION
Reel/Frame 040593/0364 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2003
From: UPADHYA, GIRISH; HERMS, RICHARD; ZHOU, PENG; GOODSON, KENNETH; HOM, JAMES
To: COOLIGY, INC.
Reel/Frame 014665/0560 →