IP Library Granted Patent US 7,057,187
Granted Patent B1
US 7,057,187 · App. 10/704,382 · Granted Jun 6, 2006

Scintillator optical system and method of manufacture

Assignee: Xradia, Inc.
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Quick Facts
Patent No.
US 7,057,187
App. No.
10/704,382
Granted
Jun 6, 2006
Kind
B1
Abstract

A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.

Claims (40)

1. A scintillator optical system comprising:

scintillator material;

a lens system for collecting light generated in the scintillator material, wherein the lens system comprises an objective lens and a tube lens; and

a substrate for spacing the scintillator material from the lens system.

2. A scintillator optical system as claimed in claim 1 , wherein the scintillator material is crystalline.

3. A scintillator optical system as claimed in claim 1 , wherein the scintillator material is thallium doped CsI or LSO.

4. A scintillator optical system as claimed in claim 1 , wherein the scintillator material is less than 50 micrometers thick.

5. A scintillator optical system as claimed in claim 1 , wherein the scintillator material is bonded to the substrate.

6. A scintillator optical system as claimed in claim 1 , wherein the objective lens has a focal point set at infinity.

7. A scintillator optical system as claimed in claim 1 , wherein the substrate thickness is set based on a working distance of the lens system.

8. A scintillator optical system as claimed in claim 1 , the scintillator material having a thickness in direction of an optical axis selected to function as a low pass filter of the X-rays by only converting lower energy X-rays to the light.

9. A scintillator optical system as claimed in claim 8 , wherein the scintillator material is crystalline.

10. A scintillator optical system as claimed in claim 8 , wherein the scintillator material is thallium doped CsI or LSO.

11. A scintillator optical system as claimed in claim 8 , wherein the scintillator material is less than 50 micrometers thick.

12. A scintillator optical system as claimed in claim 8 , wherein the scintillator material is bonded to a substrate.

13. A scintillator optical system as claimed in claim 1 , the scintillator material being doped to a depth in a direction of an optical axis selected to function as a low pass filter of the X-rays by only converting lower energy X-rays to the light.

14. A scintillator optical system as claimed in claim 13 , wherein the scintillator material is crystalline.

15. A scintillator optical system as claimed in claim 13 , wherein the scintillator material is thallium doped CsI or LSO.

16. A scintillator optical system as claimed in claim 13 , wherein the scintillator material is less than 50 micrometers thick.

17. A scintillator optical system as claimed in claim 1 , further comprising an x ray source for irradiating a sample and a zone plate for collecting the x rays from the sample and focusing the x rays onto the scintillator material.

18. A scintillator optical system, comprising:

scintillator material;

a lens system for collecting light generated in the scintillator material; and

a substrate for spacing the scintillator material from the lens system, wherein the substrate thickness is set based on a working distance of the lens system.

19. A scintillator optical system as claimed in claim 18 , further comprising an x ray source for irradiating a sample and a zone plate for collecting the x rays from the sample and focusing the x rays onto the scintillator material.

20. A scintillator optical system as claimed in claim 18 , wherein the scintillator material is crystalline.

21. A scintillator optical system as claimed in claim 18 , wherein the scintillator material is thallium doped CsI or LSO.

22. A scintillator optical system as claimed in claim 18 , wherein the scintillator material is less than 50 micrometers thick.

23. A scintillator optical system as claimed in claim 18 , wherein the scintillator material is bonded to the substrate.

24. A scintillator optical system as claimed in claim 18 , wherein the lens system comprises an objective lens and a tube lens.

25. A scintillator optical system as claimed in claim 24 , wherein the objective lens has a focal point set at infinity.

26. A scintillator optical system as claimed in claim 18 , the scintillator material having a thickness in direction of an optical axis selected to function as a low pass filter of the X-rays by only converting lower energy X-rays to the light.

27. A scintillator optical system as claimed in claim 26 , wherein the scintillator material is crystalline.

28. A scintillator optical system as claimed in claim 26 , wherein the scintillator material is thallium doped CsI or LSO.

29. A scintillator optical system as claimed in claim 26 , wherein the scintillator material is less than 50 micrometers thick.

30. A scintillator optical system as claimed in claim 26 , wherein the scintillator material is bonded to the substrate.

31. A scintillator optical system as claimed in claim 18 , the scintillator material being doped to a depth in a direction of an optical axis selected to function as a low pass filter of the X-rays by only converting lower energy X-rays to the light.

32. A scintillator optical system as claimed in claim 31 , wherein the scintillator material is crystalline.

33. A scintillator optical system as claimed in claim 31 , wherein the scintillator material is thallium doped CsI or LSO.

34. A scintillator optical system as claimed in claim 31 , wherein the scintillator material is less than 50 micrometers thick.

Assignments (3)
MERGER Recorded Jan 10, 2014
From: XRADIA, INC.
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 031938/0108 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2004
From: YUN, WENBING; WANG, YUXIN; TRAPP, DAVID R.
To: XRADIA, INC.
Reel/Frame 015451/0937 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2004
From: YUN, WEINBING; WANG, YUXIN; TRAPP, DAVID R.
To: XRADIA, INC.
Reel/Frame 014651/0531 →