Bipolar junction transistor and fabricating method
View Patent ↗A bipolar junction transistor (BJT) includes a dielectric layer formed on a predetermined region of a substrate, an opening formed in the dielectric layer and a portion of the substrate being exposed, a heavily doped polysilicon layer formed on a sidewall of the opening to define a self-aligned base region in the opening, an intrinsic base doped region formed within the substrate and in a bottom of the opening by implanting through the self-aligned base region, a spacer formed on the heavily doped polysilicon layer to define a self-aligned emitter region in the opening, and an emitter conductivity layer being filled with the self-aligned emitter region and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.
1. A bipolar junction transistor, comprising:
a substrate;
at least a deep isolation trench formed in the substrate and at least a channel stop region formed in the bottom of the deep isolation trench;
a dielectric layer formed on the substrate;
an opening formed in the dielectric layer to expose a portion of the substrate;
a selective implant collector region formed in the substrate and beneath the opening;
a heavily doped polysilicon layer formed on a sidewall of the opening to define a self-aligned base region in the opening;
an intrinsic base doped region positioned in a bottom of the opening and within the self-aligned base region defined by the heavily doped polysilicon layer;
a spacer formed on the heavily doped polysilicon layer to define a self-aligned emitter region in the opening; and
an emitter conductivity layer being filled within the self-aligned emitter region, and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.
2. The bipolar junction transistor of claim 1 , wherein the heavily doped polysilicon layer comprises a boron dopant with a dosage ranging from 1E19 to 1E21 atoms/cm 2 .
3. The bipolar junction transistor of claim 1 , wherein the substrate is a silicon substrate.
4. The bipolar junction transistor of claim 1 , wherein the substrate is a non-selective epitaxial silicon substrate.
5. The bipolar junction transistor of claim 1 , further comprising a salicide layer formed on the emitter conductivity layer.
6. The bipolar junction transistor of claim 1 , further comprising an extended conductivity layer formed on the dielectric layer to connect to the heavily doped polysilicon layer.
7. The bipolar junction transistor of claim 6 , further comprising an oxide layer and a silicon nitride layer formed between the extended conductivity layer and the dielectric layer.
8. The bipolar junction transistor of claim 6 , wherein the extended conductivity layer is composed of in-situ doped polysilicon.
9. The bipolar junction transistor of claim 6 , further comprising a salicide layer formed on the extended conductivity layer.
10. The bipolar junction transistor of claim 1 , wherein the intrinsic base doped region comprises a boron dopant.
11. A bipolar junction transistor, comprising:
a substrate;
at least a deep isolation trench formed in the substrate and at least a channel stop region formed in the bottom of the deep isolation trench;
a dielectric layer formed on the substrate;
an opening formed in the dielectric layer to expose a portion of the substrate;
a doped polysilicon layer formed on a sidewall of the opening and on the dielectric layer outside of the opening, the doped polysilicon layer defining a self-aligned base region in the opening;
an intrinsic base doped region positioned in a bottom of the opening and within the self-aligned base region defined by the doped polysilicon layer;
a spacer formed on the doped polysilicon layer to define a self-aligned emitter region in the opening; and
an emitter conductivity layer being filled within the self-aligned emitter region, and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.
12. The bipolar junction transistor of claim 11 , wherein the doped polysilicon layer comprises a boron dopant.
13. The bipolar junction transistor of claim 11 , further comprising a salicide layer formed on the emitter conductivity layer and on the portion of the doped polysilicon layer outside of the opening.
14. The bipolar junction transistor of claim 11 , further comprising a selective implant collector (SIC) region formed in the substrate beneath the intrinsic base doped region.
15. The bipolar junction transistor of claim 11 , wherein the intrinsic base doped region comprises a boron dopant.
16. A bipolar junction transistor, comprising:
a substrate;
at least a deep isolation trench formed in the substrate and at least a channel stop region formed in the bottom of the deep isolation trench;
a dielectric layer formed on the substrate;
an opening formed in the dielectric layer to expose a portion of the substrate;
a heavily doped polysilicon layer formed on a sidewall of the opening to define a self-aligned base region in the opening;
an intrinsic base doped region positioned in a bottom of the opening and within the self-aligned base region defined by the heavily doped polysilicon layer;
a spacer formed on the heavily doped polysilicon layer to define a self-aligned emitter region in the opening; and
an emitter conductivity layer being filled within the self-aligned emitter region, and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.