Method for fabricating a semiconductor device having a heat radiation layer including forming scribe lines and dicing
View Patent ↗A fabricating method for a semiconductor device includes forming a heat spreading material on rear surface of the semiconductor wafer. The semiconductor wafer has a plurality of device areas and scribe lines which are arranged between the device areas. After the heat spreading material is formed on rear surface of the semiconductor wafer, the semiconductor wafer is separated at the scribe lines.
1. A method of fabricating a semiconductor device comprising:
providing a semiconductor wafer having a first surface and a second surface opposite of the first surface, the first surface having a plurality of circuit elements each of which is defined by scribe lines formed in the substrate;
forming a sealing resin on the first surface of the substrate;
forming a plurality of external terminals on the first surface of the substrate, wherein the external terminals respectively electrically connect to the circuit elements and project from the sealing resin;
forming a metal heat conduction film on the second surface of the substrate;
forming a heat spreading material on the metal heat conduction film and;
separating the semiconductor wafer by cutting the substrate at the scribe lines after the heat spreading material is formed on the metal heat conduction film.
2. The method according to the claim 1 , further comprising polishing the second surface of the substrate before said forming a metal heat conduction film.
3. A method of fabricating a semiconductor device comprising:
providing a semiconductor wafer having a first surface and a second surface opposite of the first surface, the first surface having a plurality of circuit elements each of which is defined by scribe lines formed in the semiconductor wafer;
forming a sealing resin on the first surface of the semiconductor wafer;
forming a plurality of external terminals on the first surface of the semiconductor wafer, wherein the external terminals respectively electrically connect to the circuit elements and project from the sealing resin;
selectively forming a heat spreading material on the second surface of the semiconductor wafer, after said forming the sealing resin, wherein the scribe lines are exposed from the heat spreading material; and
separating the semiconductor wafer at the scribe lines after the heat spreading material is formed on the second surface of the semiconductor wafer.
4. The method according to the claim 3 , wherein said selectively forming the heat spreading material includes forming a first mask that covers the scribe lines, and then forming the heat spreading material on the second surface using the first mask.
5. The method according to the claim 4 , wherein the first mask is removed after forming the heat spreading material.
6. The method according to the claim 5 , further comprising forming a second mask on the scribe line after forming the first mask, wherein the second mask is removed before removing the first mask.
7. The method according to claim the 6 , wherein the first mask is a photoresist material and the second mask is a metal mask.
8. The method according to the claim 5 , further comprising forming a second mask on the peripheral area of the semiconductor wafer after forming the first mask, wherein the second mask is removed before removing the first mask.
9. The method according to the claim 8 , wherein the first mask is a photoresist material and the second mask is a metal mask.
10. The method according to claim 1 , wherein a thickness of the heat spreading material ranges from 5 μm to 200 μm.
11. The method according to claim 1 , wherein the heat spreading material includes ceramic powder.
12. The method according to claim 1 , wherein the heat spreading material is supplied over the second surface by spray coating.
13. The method according to claim 1 , wherein the heat spreading material is supplied over the second surface by printing.
14. The method according to claim 1 , wherein said forming the heat spreading material includes supplying liquid type heat spreading material over the second surface and solidifying the liquid type heat spreading material.
15. The method according to claim 3 , wherein a thickness of the heatspreading material ranges from 5 μm to 200 μm.
16. The method according to claim 3 , wherein the heat spreading material includes ceramic powder.
17. The method according to claim 3 , wherein the heat spreading material is supplied on the second surface by spray coating.
18. The method according to claim 3 , wherein the heat spreading material is supplied on the second surface by printing.
19. The method according to claim 3 , wherein said forming the heat spreading material includes supplying liquid type heat spreading material on the second surface and solidifying the liquid type heat spreading material.
20. A method of fabricating a semiconductor device comprising:
providing a semiconductor wafer having a substrate with a first surface and a second surface opposite of the first surface, the first surface having a plurality of circuit elements each of which is defined by scribe lines formed in the substrate;
forming a sealing resin on the first surface of the substrate;
forming a plurality of external terminals on the first surface of the substrate, wherein the external terminals respectively electrically connect to the circuit elements and project from the sealing resin;
forming a metal heat conduction film on the second surface of the substrate;
forming a material film that covers the metal heat conduction film, the material film having a heat radiating ratio that is greater than a heat radiating ratio of the substrate; and
separating the semiconductor wafer by cutting the substrate at the scribe lines after said forming a material film.
21. The method according to claim 20 , wherein the material film includes ceramic powder.