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App. No. 10/718,832 · Confirmation No. 1330

Plasma etching uniformity control

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-03-29 ABN Abandonment 2 View
2006-09-25 CTNF Non-Final Rejection 14 View
2006-09-25 SRFW Search information including classification, databases and other search related notes 1 View
2006-09-19 SRNT Examiner's search strategy and results 2 View
2006-07-10 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-07-10 CLM Claims 4 View
2006-07-10 REM Applicant Arguments/Remarks Made in an Amendment 13 View
2006-07-10 RCEX Request for Continued Examination (RCE) 1 View
2006-07-10 WFEE Fee Worksheet (SB06) 1 View
2006-05-04 CTFR Final Rejection 16 View
2006-05-04 892 List of references cited by examiner 1 View
2006-05-04 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-01 SRNT Examiner's search strategy and results 6 View
2006-02-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-02-16 CLM Claims 4 View
2006-02-16 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2006-02-16 XT/ Extension of Time 1 View
2006-02-16 WFEE Fee Worksheet (SB06) 1 View
2005-09-12 CTNF Non-Final Rejection 10 View
2005-09-12 892 List of references cited by examiner 1 View
2005-09-12 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-12 BIB Bibliographic Data Sheet 2 View
2005-09-06 SRNT Examiner's search strategy and results 5 View
2005-06-20 RCEX Request for Continued Examination (RCE) 1 View
2005-06-20 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-06-20 CLM Claims 4 View
2005-06-20 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2005-06-20 XT/ Extension of Time 1 View
2005-06-20 WFEE Fee Worksheet (SB06) 1 View
2005-05-26 CTAV Advisory Action (PTOL-303) 3 View
2005-05-26 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-05-19 A.NE Response After Final Action 1 View
2005-05-19 CLM Claims 4 View
2005-05-19 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2005-05-19 XT/ Extension of Time 1 View
2005-05-19 LET. Miscellaneous Incoming Letter 1 View
2005-05-19 WFEE Fee Worksheet (SB06) 1 View
2005-05-19 WFEE Fee Worksheet (SB06) 2 View
2005-04-20 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2005-01-26 CTFR Final Rejection 12 View
2005-01-26 1449 List of References cited by applicant and considered by examiner 1 View
2005-01-26 SRFW Search information including classification, databases and other search related notes 1 View
2005-01-21 SRNT Examiner's search strategy and results 3 View
2004-10-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-10-18 CLM Claims 4 View
2004-10-18 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-10-18 OATH Oath or Declaration filed 1 View
2004-10-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-10-18 FOR Foreign Reference 4 View
2004-10-18 XT/ Extension of Time 1 View
2004-10-18 WFEE Fee Worksheet (SB06) 1 View
2004-09-03 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2004-07-01 CTNF Non-Final Rejection 6 View
2004-07-01 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-01 892 List of references cited by examiner 1 View
2004-07-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-28 SRNT Examiner's search strategy and results 1 View
2003-11-21 TRNA Transmittal of New Application 2 View
2003-11-21 SPEC Specification 11 View
2003-11-21 CLM Claims 5 View
2003-11-21 ABST Abstract 1 View
2003-11-21 DRW Drawings-only black and white line drawings 6 View
2003-11-21 OATH Oath or Declaration filed 5 View
2003-11-21 A.PE Preliminary Amendment 1 View
2003-11-21 SPEC Specification 1 View
2003-11-21 CLM Claims 2 View
2003-11-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-11-21 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2003-11-21 WFEE Fee Worksheet (SB06) 1 View
2003-11-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/718,832
Filed
2003-11-21
Pub. No.
US20040099376A1
Art Unit
1763