IP Library › Granted Patent US 6,737,358
Granted Patent Utility
US 6,737,358 · Confirmation No. 8879

PLASMA ETCHING UNIFORMITY CONTROL

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2010-08-25 PA.. Power of Attorney 1 View
2010-04-08 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-04-08 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-03-30 PA.. Power of Attorney 1 View
2004-03-26 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-02-10 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-10 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-02-10 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-10 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-11-19 CLM Claims 7 View
2003-11-19 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-09 CTNF Non-Final Rejection 4 View
2003-09-09 892 List of references cited by examiner 1 View
2003-09-06 SRNT Examiner's search strategy and results 7 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 2 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-09-06 SRNT Examiner's search strategy and results 1 View
2003-06-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-05-29 CTRS Requirement for Restriction/Election 5 View
2003-03-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-03-24 CLM Claims 5 View
2003-03-24 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2002-12-19 CTNF Non-Final Rejection 9 View
2002-12-19 892 List of references cited by examiner 1 View
2002-12-19 FOR Foreign Reference 5 View
2002-12-19 1449 List of References cited by applicant and considered by examiner 1 View
2002-12-10 SRNT Examiner's search strategy and results 2 View
2002-12-10 SRNT Examiner's search strategy and results 2 View
2002-12-10 SRNT Examiner's search strategy and results 2 View
2002-08-02 C.AD Change of Address 1 View
2002-06-14 LET. Miscellaneous Incoming Letter 4 View
2002-06-14 OATH Oath or Declaration filed 4 View
2002-06-14 DRW Drawings-only black and white line drawings 6 View
2002-06-14 XT/ Extension of Time 1 View
2002-06-14 TRNA Transmittal of New Application 4 View
2002-06-14 DRW Drawings-only black and white line drawings 6 View
2002-06-14 OATH Oath or Declaration filed 2 View
2002-03-20 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-13 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-13 FWCLM Index of Claims 1 View
2002-02-13 TRNA Transmittal of New Application 2 View
2002-02-13 DRW Drawings-only black and white line drawings 6 View
2002-02-13 SPEC Specification 11 View
2002-02-13 CLM Claims 5 View
2002-02-13 ABST Abstract 1 View
2002-02-13 WFEE Fee Worksheet (SB06) 1 View
2002-02-13 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-13 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-02-13 TRNA Transmittal of New Application 2 View
2002-02-13 SPEC Specification 11 View
2002-02-13 CLM Claims 5 View
2002-02-13 ABST Abstract 1 View
2002-02-13 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
Patent No.
US 6,737,358
App. No.
10/076,129
Filed
2002-02-13
Granted
2004-05-18
Pub. No.
US20030153194A1
Art Unit
1763
PTA
-24 days