IP Library Granted Patent US 6,956,997
Granted Patent B2
US 6,956,997 · App. 10/722,204 · Granted Oct 18, 2005

Methods for fabricating an aligned optoelectronic waveguide circuit

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,956,997
App. No.
10/722,204
Granted
Oct 18, 2005
Kind
B2
Abstract

Two techniques are disclosed for writing waveguides between laser diodes and an optical fiber such that the laser diodes are aligned with their respective waveguide facets. The first technique utilizes a light sensitive polymer, such as a ultra-violet (UV) cross-linkable polymer. A precision writing system locates the light emitting centers of the laser diodes and writes the waveguide circuit by exposing the waveguiding regions with the appropriate light. The unexposed areas of the core layer are developed with a solvent and removed. The entire device is then encapsulated with a low-index cladding polymer. The second technique utilizes an active polymer approach in which waveguide regions are formed when the writing beam aligns the dipole molecules in the polymer to cause a change in the refractive index of the polymer.

Claims (32)

1. A method of coupling a laser diode to an optical fiber comprising:

placing the laser diode on a substrate;

depositing a polymer layer on at least a part of the substrate between the laser diode and the optical fiber;

locating a light emitting area of the laser diode; and

forming a waveguide on the polymer layer between the light emitting area of the laser diode and the optical fiber.

2. The method of claim 1 , wherein the polymer layer is light sensitive, and wherein forming the waveguide comprises writing a waveguide region on the polymer layer, developing the polymer layer with a solvent, and removing unexposed regions of the polymer layer.

3. The method of claim 2 , further comprising encapsulating the waveguide with a low-index cladding polymer layer.

4. The method of claim 2 , wherein writing the waveguide region comprises writing the waveguide region using a collimated light beam.

5. The method of claim 1 , further comprising depositing a cladding layer of light-curable optical polymer on the substrate, wherein the laser diode is placed on the cladding layer.

6. The method of claim 5 , wherein depositing the polymer layer comprises depositing the polymer layer on the cladding layer and the laser diode.

7. The method of claim 1 , wherein the optical fiber is coupled to a plurality of waveguide branches, placing the laser diode comprises placing a plurality of laser diodes on the substrate, and forming the waveguide comprises forming a plurality of waveguides, each said waveguide being formed between one of the laser diodes and a corresponding one of the waveguide branches.

8. The method of claim 7 , wherein the plurality of laser diodes comprises an array of laser diodes having predetermined spacings therebetween, wherein locating the light emitting area comprises locating the light emitting area of one of the laser diodes in the array.

9. The method of claim 1 , further comprising encapsulating the waveguide with a low-index cladding polymer.

10. The method of claim 1 , wherein the optical fiber is coupled to a plurality of waveguide branches, and forming the waveguide comprises forming the waveguide between the light emitting area of the laser diode and one of the waveguide branches.

11. The method of claim 1 , wherein placing the laser diode comprises etching the polymer layer to form a trench, and placing the laser diode in the trench.

12. The method of claim 1 , wherein the polymer layer comprises a nonlinear optically active polymer, and writing the waveguide comprises writing the waveguide using a laser beam so as to align dipole molecules of the polymer using an electric field of the laser beam, thereby causing a change in a local refractive index of the polymer.

13. The method of claim 1 , further comprising depositing a buffer layer of low-index passive polymer on the substrate prior to depositing the polymer layer.

14. The method of claim 1 , further comprising depositing a low-index cladding layer over the polymer layer.

15. A method of coupling a laser diode to an optical fiber comprising:

placing a cladding layer on a substrate;

placing the laser diode on the cladding layer;

depositing a polymer layer on the laser diode and the cladding layer;

locating a light emitting area of the laser diode; and

forming a waveguide on the polymer layer between the light emitting area of the laser diode and the optical fiber.

16. A method of coupling a laser diode to an optical fiber comprising:

depositing a buffer layer on a substrate;

depositing a polymer layer on the buffer layer;

depositing a cladding layer on the polymer layer;

etching a trench into the layers to a depth such that the laser diode placed in the trench would be aligned with a plane of the polymer layer;

placing the laser diode in the trench;

locating a light emitting area of the laser diode; and

forming a waveguide on the polymer layer between the light emitting area of the laser diode and the optical fiber.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2013
From: EMCORE CORPORATION
To: SUMITOMO ELECTRIC DEVICE INNOVATIONS, U.S.A., INC.
Reel/Frame 030006/0126 →
PARTIAL RELEASE OF SECURITY INTEREST Recorded May 11, 2012
From: WELLS FARGO BANK, NATIONAL ASSOCIATION
To: EMCORE CORPORATION; EMCORE SOLAR POWER, INC.
Reel/Frame 028192/0189 →
RELEASE OF SECURITY INTEREST Recorded Oct 12, 2011
From: BANK OF AMERICA, N.A.
To: EMCORE CORPORATION; EMCORE SOLAR POWER, INC.
Reel/Frame 027050/0880 →
SECURITY AGREEMENT Recorded May 18, 2011
From: EMCORE CORPORATION; EMCORE SOLAR POWER, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION
Reel/Frame 026304/0142 →
SECURITY AGREEMENT Recorded Nov 12, 2008
From: EMCORE CORPORATION
To: BANK OF AMERICA, N.A.
Reel/Frame 021824/0019 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2004
From: AMLESHI, PEEROUZ; CHOUDHURY, MASUM; KAO, LAWRENCE; OGANESSYAN, GOURGEN
To: EMCORE CORPORATION
Reel/Frame 015745/0266 →