Semiconductor device and method for manufacturing same
View Patent ↗A semiconductor device is provided which has a capacitor insulating film made up of zirconium aliminate being an amorphous film obtained by having crystalline dielectric contain amorphous aluminum oxide and having its composition of Al X Zr (1-X) O Y (0.05≦x≦0.3), hereby being capable of preventing, in a process of forming a capacitor of MIM (Metal Insulator Metal) structure, dielectric breakdown of a capacitor insulating film while a relative dielectric constant of a metal oxide film used as the capacitor insulating film is kept high.
1. A semiconductor device comprising:
a capacitor of MIM (Metal Insulator Metal) structure comprising a lower electrode and an upper electrode each made up of a metal film, and a capacitor insulating film sandwiched between said lower electrode and said upper electrode;
wherein said capacitor insulating film is an amorphous metal oxide film consisting essentially of aluminum, a metal other than aluminum and oxygen, and a ratio “X” of a number of aluminum atoms to a sum of numbers of said aluminum atoms and the metal atoms other than said aluminum atom is set to be 0.05≦x≦0.3.
2. The semiconductor device according to claim 1 , wherein said metal other than said aluminum has a strong tendency to crystallize with oxygen.
3. The semiconductor device according to claim 1 , wherein said capacitor insulating film has a film thickness of 5 nm to 20 nm.
4. The semiconductor device according to claim 1 , wherein said metal other than said aluminum is at least any one selected from a group of zirconium, hafnium, or lanthanoid group element.
5. The semiconductor device according to claim 1 , wherein said upper electrode and said lower electrode are made of titanium nitride, tantalum nitride, or tungsten nitride.
6. The semiconductor device according to claim 1 , wherein said capacitor insulating film is formed by an ALD (Atomic Layer Deposition) method or a CVD (Chemical Vapor Deposition) method.
7. A semiconductor device comprising:
a capacitor of MIM (Metal Insulator Metal) structure comprising a lower electrode and an upper electrode each made up of a metal film, and a capacitor insulating film sandwiched between said lower electrode and said upper electrode;
wherein said capacitor insulating film is an amorphous metal oxide film consisting essentially of aluminum oxide, a metal oxide other than aluminum oxide, and a ratio “X” of a number of aluminum atoms to a sum of numbers of said aluminum atoms and the metal atoms other than said aluminum atom is set to be 0.05≦X≦0.3.
8. The semiconductor device according to claim 7 , wherein said metal oxide other than said aluminum oxide has a strong tendency to crystallize.
9. The semiconductor device according to claim 7 , wherein said capacitor insulating film has a film thickness of 5 nm to 20 nm.
10. The semiconductor device according to claim 7 , wherein the metal other than the aluminum is at least any one selected from a group of zirconium, hafnium, or lanthanoid group element.