Image sensor and method of manufacturing the same
View Patent ↗An image sensor and a method of manufacturing the same are disclosed. When forming an impurity region for a photodiode, the photodiode can be exposed by reducing the impurity region. Thus, a depletion region of the photodiode, formed when the sensor operates, extends to the exposed surface of the photodiode through the inner region of the photodiode, so that it is possible for the photodiode to normally absorb short wavelength light as well as long wavelength light at its depletion region. Also, the uniformity of the generation of photo electrons depending on the different colors of lights can be optimized, and the color presentation quality can be further enhanced.
1. An image sensor, comprising:
an isolating region and an active region in a semiconductor substrate, wherein the active region includes a photodiode formed in a prearranged photodiode region for generating and accumulating photoelectrons, the prearranged photodiode region including a first region in a middle portion thereof and a second region comprising a remaining portion thereof;
an impurity region formed in the first region of the prearranged photodiode region, wherein the photodiode comprises the impurity region and a depletion region generated in the second region during an operation of the image sensor, portions of the depletion region being exposed at a surface of the substrate on both sides of the impurity region, wherein the depletion region is formed to not extend below an insulating layer; and
a signal processing transistor for transmitting and emitting photo electrons accumulated in the photodiode.
2. The image sensor according to claim 1 , wherein the impurity region is of n-type.
3. The image sensor according to claim 1 , wherein a concentration of the impurity region is higher than a concentration of the semiconductor substrate.
4. The image sensor according to claim 3 , wherein the concentration of the impurity region is 1×10 17 /cm 3 ˜1×10 18 /cm 3 .
5. The image sensor according to claim 1 , wherein a surface area of the impurity region is 0.25 μm 2 ˜4.0 μm 2 .
6. The method of manufacturing an image sensor, comprising:
defining an active region in a semiconductor substrate by forming an isolation;
defining a prearranged photodiode region in the active region;
forming an impurity region through selective ion implantation of impurity ions into a middle portion of the prearranged photodiode region, wherein, during an operation of the image sensor, a depletion region is formed in a portion of the prearranged photodiode region surrounding the impurity region, portions of the depletion region being exposed to a surface of the substrate on both sides of the impurity region, wherein the depletion region is formed to not extend below an insulating layer; and
forming a signal processing transistor for transmitting and emitting photo electrons accumulated in the photodiode.
7. The method according to claim 6 , wherein the impurity region is of n-type.
8. The method according to claim 6 , wherein a concentration of the impurity region is higher than the concentration of the semiconductor substrate.
9. The method according to claim 8 , wherein a concentration of the impurity region is 1×10 17 /cm 3 ˜1×10 18 /cm 3 .