CMOS image sensor and method for manufacturing the same
View Patent ↗A CMOS image sensor and a method for manufacturing the same, capable of preventing an interface between an active region and a field region in the CMOS image sensor from being damaged by ion implantation. The method comprises implanting dopant ions into a source region between a gate electrode of the reset transistor and the photodiode, using an ion implantation mask that covers predetermined locations of the field region and the source region.
1. A method for manufacturing a complementary metal oxide semiconductor (CMOS) image sensor, comprising steps of:
forming a field region defining an active region on a silicon substrate;
forming a gate electrode on the substrate;
forming a photodiode in a portion of the active region;
forming a masking layer so as to define a region for implanting dopant ions; and
performing an ion implantation of impurities into the region for implanting dopant ions for forming a lightly doped drain (LDD) structure, a source region, or a drain region, wherein, in the step of forming the masking layer, the masking layer is formed over the field region and a portion of the active region adjoining the field region between the gate electrode and the photodiode so as to define the region for implanting dopant ions.
2. The method as claimed in claim 1 , wherein said dopant ions are one of low-concentration dopant ions for an LDD structure and high-concentration dopant ions for a source region or a drain region.
3. The method as claimed in claim 1 , wherein said dopant ions are implanted into a part of the photodiode.
4. The method as claimed in claim 2 , wherein the source region is formed between the gate electrode and the photodiode.
5. The method as claimed in claim 4 , wherein said low-concentration dopant ions for the LDD structure are implanted into a location including a predetermined portion of said field region and the source region, and said high-concentration dopant ions for said source or drain region are implanted so as not to be implanted beyond the source region.
6. The method as claimed in claim 4 , wherein said low-concentration dopant ions for the LDD structure are implanted into a location including a predetermined portion of said field region and the source region, and said high-concentration dopant ions for said source or drain region are implanted only into a region on a side of the gate electrode opposite to the source region.
7. The method as claimed in claim 1 , further comprising a step of forming a channel stop region having a predetermined thickness beneath said field region and in a predetermined part of said active region adjoining the field region.
8. The method as claimed in claim 1 , further comprising a step of forming a channel stop region having a predetermined thickness beneath said field region and in a predetermined part of said active region adjoining the field region.
9. The method as claimed in claim 8 , wherein said channel stop region is formed by implanting boron ions as p-type dopant ions at an energy between 80 and 150 KeV and a concentration between 0.5~5×10 13 ion/cm 2 .
10. A method for manufacturing a complementary metal oxide semiconductor (CMOS) image sensor, in which the CMOS image sensor includes a photodiode and a reset transistor, the method comprising a step of
defining an active region by means of a field region in such a manner that a source region between a gate electrode of the reset transistor and the photodiode has a width widened from the gate electrode toward the photodiode.
11. The method as claimed in claim 10 , further comprising a step of forming a channel stop region having a predetermined thickness beneath the field region and in a predetermined location of the active region adjoining the field region.
12. The method as claimed in claim 11 , wherein said channel stop region is formed by implanting boron ions as p-type dopant ions at an energy between 80 and 150 KeV and a concentration between 0.5~5×10 13 ion/cm 2 .
13. A method for manufacturing a complementary metal oxide semiconductor (CMOS) image sensor, comprising steps of:
forming a field region defining an active region on a silicon substrate;
forming a gate electrode on the substrate;
forming a photodiode in a portion of the active region;
forming a masking layer over the field region, and performing a low-concentration dopant ion implantation for an LDD structure;
forming a masking layer over the field region and a portion of the active region adjoining the field region between the gate electrode and the photodiode so as to define the region for implanting a high-concentration dopant ions; and
performing a high-concentration dopant ion implantation into the region for implanting a high concentration dopant ions for forming a source region or a drain region.
14. A method for manufacturing a complementary metal oxide semiconductor (CMOS) image sensor, comprising steps of:
forming a field region defining an active region on a silicon substrate;
forming a gate electrode on the substrate;
forming a photodiode in a portion of the active region;
forming a masking layer over the field region, and performing a low-concentration dopant ion implantation for an LDD structure;
forming a masking layer over the field region, the photodiode, and a region between the gate electrode and the photodiode so as to define a region for implanting a high-concentration dopant ions; and
performing a high-concentration dopant ion implantation into the region for implanting a high concentration dopant ions for forming a source region or a drain region.