Electrostatic discharge performance of a silicon structure and efficient use of area with electrostatic discharge protective device under the pad approach and adjustment of via configuration thereto to control drain junction resistance
View Patent ↗More efficient use of silicon area is achieved by incorporating an electrostatic discharge protective (ESDP) device beneath a pad area of a semiconductor structure. The pad area includes a substrate having a first metal layer above it. A second metal layer is above the first metal layer. The ESDP device resides in the substrate below the first metal layer. A layer of dielectric separates the first and second metal layers. A via within the dielectric layer electrically couples the first and second metal layers. A via connects to the ESDP component. Subsequent metal layers can be arranged between the first and second metal layers. The Ohmic value of the resistance component of the ESDP device can be set during fabrication by fixing a number of individual via components, arranged electrically in parallel, by fixing the cross sectional area of the via components, and/or by fixing the length of the via components.
1. A semiconductor structure comprising:
a pad area;
an electrostatic discharge protective device disposed directly below said pad area, said electrostatic discharge protective device comprising a transistor and a resistance, wherein said pad area comprises:
a substrate;
a first layer of metal disposed above said substrate wherein said electrostatic discharge protective device is disposed below said first layer of metal; and
a second layer of metal disposed above said first layer of metal;
a layer of dielectric disposed between said first metal layer and said second metal layer; and
a via disposed within said dielectric layer wherein said via electrically couples said first and said second metal layer, wherein said via comprises a plurality of individual vias, wherein said resistance comprises a portion of said plurality of individual vias, wherein said individual vias comprising said portion are arranged electrically in parallel one to another and wherein a resistive value of said resistance is configured during a process for fabricating said semiconductor structure, wherein said resistive value of said resistance is fixed therein with setting a particular number for said portion of said plurality of individual vias in parallel and wherein said setting tunes said electrostatic discharge protective device for performing an electrostatic discharge protective function.
2. The semiconductor structure as recited in claim 1 further comprising a subsequent layer of metal between said first and said second metal layers.
3. The semiconductor structure as recited in claim 1 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular cross sectional area.
4. The semiconductor structure as recited in claim 1 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular length.
5. A pad area apparatus for a semiconductor structure comprising:
a substrate;
a first layer of metal disposed above said substrate;
a second layer of metal disposed over said first layer of metal;
an electrostatic discharge protective device wherein said electrostatic discharge protective device is disposed within said substrate directly below said pad area and wherein said electrostatic discharge protective device comprises a transistor and a resistance;
a layer of dielectric disposed between said first metal layer and said second metal layer; and
a via disposed within said dielectric layer wherein said via electrically couples said first and said second metal layer, wherein said via comprises a plurality of individual vias, wherein said resistance comprises a portion of said plurality of individual vias, wherein said individual vias comprising said portion are arranged electrically in parallel one to another and wherein a resistive value of said resistance is configured during a process for fabricating said semiconductor structure, wherein said resistive value of said resistance is fixed therein with setting a particular number for said portion of said plurality of individual vias in parallel and wherein said setting tunes said electrostatic discharge protective device for performing an electrostatic discharge protective function.
6. The pad area apparatus as recited in claim 5 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular cross sectional area.
7. The pad area apparatus as recited in claim 5 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular length.
8. An electrostatic discharge protective device for a semiconductor structure comprising:
a resistance; and
a transistor disposed within a substrate directly below a pad area of said semiconductor structure, wherein said resistance comprises a plurality of vias of said semiconductor structure, wherein said vias are arranged electrically in parallel, one to another, and wherein a resistive value of said resistance is configured during a process for fabricating said semiconductor structure wherein said resistive value of said resistance is fixed with setting a particular number for said portion of said plurality of individual vias in parallel and wherein said setting tunes said electrostatic discharge protective device for performing an electrostatic discharge protective function.
9. The electrostatic discharge protective device as recited in claim 8 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular cross sectional area.
10. The electrostatic discharge protective device as recited in claim 8 wherein said resistive value of said resistance is fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular length.
11. A method of fabricating an semiconductor structure, comprising:
disposing a pad area upon a substrate;
disposing an electrostatic discharge protective device directly below said pad area, said electrostatic discharge protective device comprising a transistor and a resistance, wherein said pad area comprises:
a first layer of metal disposed above said substrate wherein said electrostatic discharge protective device is disposed below said first layer of metal; and
a second layer of metal disposed above said first layer of metal;
disposing a layer of dielectric between said first metal layer and said second metal layer; and
disposing a via within said dielectric layer wherein said via electrically couples said first and said second metal layer, wherein said via comprises a plurality of individual vias wherein said resistance comprises a portion of said plurality of individual vias, wherein said individual vias comprising said portion are arranged electrically in parallel one to another wherein said disposing a via comprises actively configuring a resistive value of said resistance, wherein said resistive value of said resistance is fixed therein with setting a particular number for said portion of said plurality of individual vias in parallel and wherein said setting tunes said electrostatic discharge protective device for performing an electrostatic discharge protective function.
12. The method as recited in claim 11 wherein said resistive value of said resistance is further fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular cross sectional area.
13. The method as recited in claim 11 wherein said resistive value of said resistance is further fixed with forming said individual vias comprising said portion of said plurality of individual vias with a particular length.