System and method for integration of HfO
View Patent ↗A method for fabricating a portion of an integrated circuit on a semiconductor substrate. The method includes cleaning the surface of the substrate, and forming a thin insulate over the substrate. The method also includes depositing a high dielectric constant (high-k) material over the thin insulate, and then performing a hydrogen-based anneal on the high-k material. The method further includes performing an oxygen-based anneal on the high-k material, wherein the hydrogen-based and oxygen-based anneals occur sequentially.
1. A method for fabricating a portion of an integrated circuit on a semiconductor substrate, the method comprising:
cleaning the surface of the substrate;
forming a thin insulate over the substrate;
depositing a high dielectric constant (high-k) material over the thin insulate;
performing a hydrogen-based anneal on the high-k material; and
performing an oxygen-based anneal on the high-k material, wherein the hydrogen-based and oxygen-based anneals occur sequentially.
2. The method of claim 1 further comprising:
selecting a first temperature, a first pressure, and a first time for the hydrogen-based anneal; and
selecting a second temperature, a second pressure, and a second time for the oxygen-based anneal.
3. The method of claim 2 wherein the first temperature is selected from a range between about 500° C. and about 1000° C., the first pressure is selected from a range between about 0.1 torr and about 760 torr, and the first time is selected from a range between about 10 seconds and about 10 minutes.
4. The method of claim 3 wherein the first temperature is about 800° C., the first pressure is about 40 torr, and the first time is about 1 minute.
5. The method of claim 2 wherein the second temperature is selected from a range between about 700° C. and about 900° C., the second pressure is selected from a range between about 1 millitorr and about 10 torr, and the second time is selected from a range between about 1 second and about 300 seconds.
6. The method of claim 1 further comprising selecting a first chemical for the hydrogen-based anneal and a second chemical for the oxygen-based anneal, wherein the first and second chemicals are selected based on a chemical composition of the high-k material.
7. The method of claim 6 wherein the first chemical is selected from the group consisting of:
H 2 ;
NH 3 ; and
SiH 4 .
8. The method of claim 6 wherein the second chemical is selected from the group consisting of:
O 2 ;
N 2 O;
NO; and
D 2 O.
9. The method of claim 1 wherein the high-k material is deposited using an atomic layer deposition (ALD) process.
10. The method of claim 9 wherein the high-k material is HfO 2 , and wherein the method further comprises selecting an HfO 2 deposition temperature from a range between about 200° C. and about 400° C., and selecting a deposition depth from a range between about 3 Angstroms and about 75 Angstroms.
11. The method of claim 10 wherein a plurality of cycles of the ALD process are performed until the selected deposition depth is attained.
12. The method of claim 1 wherein the substrate comprises diamond.
13. A method for fabricating a portion of an integrated circuit on a semiconductor substrate, the method comprising:
placing a pseudo-substrate in a process reactor;
applying a loading treatment to the pseudo-substrate;
removing the pseudo-substrate from the process reactor;
placing a device substrate into the process reactor; and
forming a poly-silicon layer upon the device substrate.
14. The method of claim 13 wherein the pseudo-substrate comprises a material selected from the group consisting of:
silicon; and
diamond.
15. The method of claim 13 further comprising:
selecting a first temperature, a first pressure, and a first time for the loading treatment; and
selecting a second temperature, a second pressure, and a second time for the poly-silicon layer formation.
16. The method of claim 15 wherein the first temperature is selected from a range between about 550° C. and about 750° C., the first pressure is selected from a range between about 0.1 torr and about 80 torr, and the first time is selected from a range between about 1 second and about 5 minutes.
17. The method of claim 16 wherein the first temperature is about 625° C., the first pressure is about 40 torr, and the first time is about 1 minute.
18. The method of claim 15 wherein the second temperature is selected from a range between about 700° C. and about 900° C., the second pressure is selected from a range between about 1 millitorr and about 760 torr, and the second time is selected from a range between about 1 second and about 20 minutes.
19. The method of claim 13 further comprising selecting a chemical for the loading treatment.
20. The method of claim 19 wherein the chemical is selected from the group consisting of:
H 2 ;
NH 3 ; and
SiH 4 .
21. The method of claim 13 wherein the loading treatment is performed within the same process environment as the poly-silicon formation.
22. The method of claim 13 wherein the loading treatment is performed within an individual process environment.
23. The method of claim 13 wherein the loading treatment employs a plasma.
24. A method for fabricating a portion of an integrated circuit on a semiconductor substrate, the method comprising:
cleaning the surface of the substrate;
forming a thin insulate over the substrate;
depositing a high dielectric constant (high-k) material over the thin insulate;
performing a hydrogen-based anneal on the high-k material;
performing an oxygen-based anneal on the high-k material, wherein the hydrogen-based and oxygen-based anneals occur sequentially;
applying a loading treatment to the high-k material; and
forming a poly-silicon layer on the treated high-k material, wherein the loading treatment and poly-silicon deposition occur sequentially.
25. The method of claim 24 further comprising:
selecting a first temperature, a first pressure, and a first time for the hydrogen-based anneal;
selecting a second temperature, a second pressure, and a second time for the oxygen-based anneal;
selecting a third temperature, a third pressure, and a third time for the loading treatment; and
selecting a fourth temperature, a fourth pressure, and a fourth time for the poly-silicon layer formation.
26. The method of claim 25 wherein the first temperature is selected from a range between about 500° C. and about 1000° C., the first pressure is selected from a range between about 0.1 torr and about 760 torr, and the first time is selected from a range between about 10 seconds and about 10 minutes.
27. The method of claim 26 wherein the first temperature is about 800° C., the first pressure is about 40 torr, and the first time is about 1 minute.
28. The method of claim 25 wherein the second temperature is selected from a range between about 700° C. and about 900° C., the second pressure is selected from a range between about 1 millitorr and about 10 torr, and the second time is selected from a range between about 1 second and about 300 seconds.
29. The method of claim 25 wherein the third temperature is selected from a range between about 450° C. and about 650° C., the third pressure is selected from a range between about 0.1 torr and about 80 torr, and the third time is selected from a range between about 1 seconds and about 5 minutes.
30. The method of claim 29 wherein the third temperature is about 500° C., the third pressure is about 40 torr, and the third time is about 2 minutes.
31. The method of claim 25 wherein the fourth temperature is selected from a range between about 700° C. and about 900° C., the fourth pressure is selected from a range between about 1 millitorr and about 760 torr, and the fourth time is selected from a range between about 1 second and about 20 minutes.
32. The method of claim 24 further comprising selecting a first chemical for the hydrogen-based anneal, a second chemical for the oxygen-based anneal, and a third chemical for the loading treatment, wherein the first, second, and third chemicals are selected based on a chemical composition of the high-k material.
33. The method of claim 32 wherein the first chemical is selected from the group consisting of:
H 2 ;
NH 3 ; and
SiH 4 .
34. The method of claim 32 wherein the second chemical is selected from the group consisting of:
O 2 ;
N 2 O;
NO; and
D 2 O.
35. The method of claim 24 wherein the high-k material is deposited using an atomic layer deposition (ALD) process.
36. The method of claim 35 wherein the high-k material is HfO 2 , and wherein the method further comprises selecting a HfO 2 deposition temperature from a range between about 200° C. and about 400° C., and selecting a deposition depth from a range between about 3 Angstroms and about 75 Angstroms.
37. The method of claim 35 wherein a plurality of cycles of the ALD process are performed until a selected deposition depth is attained.
38. The method of claim 24 wherein the loading treatment is performed within the same process environment of the poly-silicon formation.
39. The method of claim 24 wherein the loading treatment is performed within an individual process environment.
40. The method of claim 24 wherein the loading treatment employs a plasma.
41. The method of claim 24 wherein the substrate comprises diamond.
42. A method for fabricating a portion of an integrated circuit on a semiconductor substrate, the method comprising:
cleaning the surface of the substrate;
forming a thin insulate on the substrate;
depositing a high dielectric constant (high-k) material upon the thin insulate;
performing an anneal on the high-k material;
applying a hydrogen-containing gas loading treatment upon the annealed high-k material; and
forming a poly-silicon layer on the treated high-k material, wherein the hydrogen-containing gas loading treatment and poly-silicon deposition occur sequentially.
43. The method of claim 42 further comprising:
selecting a first temperature, a first pressure, and a first time for the hydrogen-containing gas loading treatment; and
selecting a second temperature, a second pressure, and a second time for the poly-silicon layer formation.
44. The method of claim 43 wherein the first temperature is selected from a range between about 450° C. and about 650° C., the first pressure is selected from a range between about 0.1 torr and about 80 torr, and the first time is selected from a range between about 1 second and about 5 minutes.
45. The method of claim 44 wherein the first temperature is about 500° C., the first pressure is about 40 torr, and the first time is about 2 minutes.
46. The method of claim 43 wherein the second temperature is selected from a range between about 700° C. and about 900° C., the second pressure is selected from a range between about 1 millitorr and about 760 torr, and the second time is selected from a range between about 1 second and about 20 minutes.
47. The method of claim 42 further comprising selecting a chemical hydrogen-containing gas for the hydrogen-containing gas loading treatment.
48. The method of claim 47 wherein the hydrogen-containing gas is selected from the group consisting of:
H 2 ;
NH 3 ; and
SiH 4 .
49. The method of claim 42 wherein the hydrogen-containing gas loading treatment is performed within the same process environment of the poly-silicon formation.
50. The method of claim 42 wherein the hydrogen-containing gas loading treatment is performed within an individual process environment.
51. The method of claim 42 wherein the hydrogen-containing gas loading treatment employs a plasma.
52. The method of claim 42 wherein the high-k material is deposited using an atomic layer deposition (ALD) process.
53. The method of claim 52 wherein the high-k material is HfO 2 , and wherein the method further comprises selecting an HfO 2 deposition temperature from a range between about 200° C. and about 400° C., and selecting a deposition depth from a range between about 3 Angstroms and about 75 Angstroms.
54. The method of claim 52 wherein a plurality of cycles of the ALD process are performed until a selected deposition depth is attained.
55. The method of claim 42 wherein the substrate comprises diamond.