Collector with fastening devices for fastening mirror shells
View Patent ↗There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.
1. A projection exposure system operable in a scanning mode along a scanning direction, comprising:
a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane , wherein said plane is defined by a local coordinate system having a y-direction parallel to said scanning direction and an x-direction perpendicular to said scanning direction, wherein said collector comprises:
(a) a first mirror shell;
(b) a second mirror shell within said first mirror shell, wherein said first mirror shell and said second mirror shell are substantially rotational symmetric about a common rotational axis; and
(c) a fastening device for fastening said first mirror shell and said second mirror shell,
wherein said fastening device has a support spoke that extends in a radial direction of said first and said second mirror shells, and
wherein said support spoke, when projected into said plane, yields a projection that is non-parallel to said y-direction.
2. The projection exposure system of claim 1 , wherein said first mirror shell and said second mirror shell each comprise a mirror segment having an optical surface area.
3. The projection exposure system of claim 1 , wherein said support spoke has a shape tapering in a radial direction towards said common rotational axis.
4. The projection exposure system of claim 1 , wherein said support spoke comprises grooves into which said first mirror shell and said second mirror shell are embedded.
5. The projection exposure system of claim 1 , wherein said support spoke tapers in a direction of said common rotational axis towards said plane.
6. The projection exposure system of claim 1 ,
wherein said spoke is one of a plurality of spokes, and
wherein at least one spoke of said plurality of spokes extends parallel to said x-direction when said plurality of spokes are projected into said plane.
7. The projection exposure system of claim 6 , wherein said plurality of support spokes includes (i) a first support spoke made of a material having a first thermal expansion coefficient, and (ii) a second support spoke made of a material having a second thermal expansion coefficient that is different from said first thermal expansion coefficient.
8. The projection exposure system of claim 1 , wherein said projection exposure system further comprises an optical element having a plurality of raster elements, wherein said optical element is arranged substantially in said plane.
9. The projection exposure system of claim 8 , wherein said projection is non-parallel to said x-direction and intersects said plurality of raster elements at different locations on said plurality of raster elements.
10. The projection exposure system of claim 9 , further comprising:
a mask; and
a projection lens for projecting said mask onto a light-sensitive object.
11. A method for producing a microelectronic component, comprising employing the projection exposure system of claim 10 .