Method for forming T-shaped conductor wires of semiconductor device
View Patent ↗A method is provided for forming a conductive wire of a semiconductor device using, for example, a damascene process. A conductive wire, such as a metal wire, is formed, based on a notching phenomenon which occurs when the etching selectivity between a polycrystalline silicon layer and a lower film is approximately 5 to 500:1.
1. A method for forming a T-shaped conductive wire of a semiconductor device, comprising:
etching a lower portion of a side wall of a silicon layer by using a notching phenomenon based on a difference between an etching rate of a silicon layer and an etching rate of a lower film to form a T-shaped silicon layer pattern; and
forming a T-shaped conductive wire based on the T-shaped silicon layer pattern.
2. The method of claim 1 , wherein the lower film comprises an insulating material, wherein an etching selectivity ratio of the insulating material to the silicon layer is 1:5 to 1:500.