Multilevel copper interconnects with low-k dielectrics and air gaps
View Patent ↗Structures and methods are provided for an improved multilevel wiring interconnect in an integrated circuit assembly. The present invention provides for a multilayer copper wiring structure by electroless, selectively deposited copper in a streamlined process which further reduces both intra-level line to line capacitance and the inter-level capacitance. In particular, an illustrative embodiment of the present invention includes a novel methodology for forming multilevel wiring interconnects in an integrated circuit assembly. The method includes forming a number of multilayer metal lines, e.g. copper lines formed by selective electroless plating, separated by air gaps above a substrate. A low dielectric constant material is deposited between the number of metal lines and the substrate using a directional process. According to the teachings of the present invention, using a directional process includes maintaining a number of air gaps in the low dielectric constant material. Structures and systems are similarly included in the present invention.
1. A multilevel wiring interconnect in an integrated circuit, comprising:
a number of multilayer metal lines connecting to a number of silicon devices in a substrate;
a low dielectric constant insulator in a number of interstices between the number of multilayer metal lines and the substrate;
wherein the low dielectric constant insulator includes a number of air gaps in the low dielectric constant material; and
wherein the low dielectric constant insulator includes a film in which of a set of methyl groups and a fluorine group of atoms are as much as 43% and 9% respectively of that for a content of silicon atoms in the film.
2. The multilevel wiring interconnect of claim 1 , wherein the low dielectric constant insulator includes a low dielectric constant organic silica film.
3. The multilevel wiring interconnect of claim 1 , wherein the low dielectric constant insulator includes a low dielectric constant insulator having a dielectric constant (k) of less than 2.7.
4. The multilevel wiring interconnect of claim 1 , wherein the number of multilayer metal lines includes a number of multilayer metal lines selected from the group consisting of Aluminum, Copper, Silver, and Gold.
5. The multilevel wiring interconnect of claim 1 , wherein the number of multilayer metal lines includes a first conductor bridge level.
6. A multilevel wiring interconnect system, comprising:
a number of multilayer metal lines connecting to a number of integrated circuit devices in a substrate;
a low dielectric constant insulator in a number of interstices between the number of multilayer metal lines and the substrate, the low dielectric constant insulator having a number of air gaps therein; and
wherein the low dielectric constant insulator includes a film in which of a set of methyl groups and a fluorine group of atoms are as much as 43% and 9% respectively of that for a content of silicon atoms in the film.
7. The system of claim 6 , wherein the number of multilayer metal lines are adapted to connect to at least one of a processor and a memory.
8. The system of claim 6 , wherein the substrate is a die.
9. The system of claim, wherein the substrate includes a silicon.
10. The system of claim 6 , wherein the number of multilayer metal lines consist essentially of copper.
11. A system having a multilevel wiring interconnect, comprising:
an integrated circuit device; and
an integrated memory circuit operably coupled to the integrated circuit device, wherein the integrated memory circuit includes a multilevel wiring interconnect, the multilevel wiring interconnect comprising:
a number of multilayer Copper lines connecting to one or more of the transistors in a substrate;
a low dielectric constant insulator in a number of interstices between the number of multilayer Copper lines and the substrate;
wherein the low dielectric constant insulator includes a number of air gaps in the low dielectric constant material; and
wherein the low dielectric constant insulator includes a film in which of a set of methyl groups and a fluorine group of atoms are as much as 43% and 9% respectively of that for a content of silicon atoms in the film.
12. The system of claim 11 , wherein the integrated circuit device includes a processor.
13. A system, comprising:
a processor; and
an integrated memory circuit coupled to the processor, wherein the integrated memory circuit further includes a multilevel wiring interconnect, the multilevel wiring interconnect comprising:
a number of multilayer Copper lines connecting to one or more of the transistors in a substrate;
a low dielectric constant insulator in a number of interstices between the number of multilayer Copper lines and the substrate;
wherein the low dielectric constant insulator includes a number of air gaps in the low dielectric constant material; and
wherein the low dielectric constant insulator includes a film in which of a set of methyl groups and a fluorine group of atoms are as much as 43% and 9% respectively of that for a content of silicon atoms in the film.
14. The system of claim 13 , wherein the low dielectric constant insulator includes a low dielectric constant organic silica film.
15. The system of claim 13 , wherein the low dielectric constant insulator includes a low dielectric constant insulator having a dielectric constant of less than 2.7.