Films doped with carbon for use in integrated circuit technology
View Patent ↗The invention pertains to films comprising silicon, oxygen and carbon and the use of the films in integrated circuit technology, such as capacitor constructions, DRAM constructions, semiconductive material assemblies, etching processes, and methods for forming capacitors, DRAMs and semiconductive material assemblies.
1. A capacitor assembly comprising:
a storage node extending within an insulative layer, wherein the storage node is next to a layer comprising silicon, about 2% to about 20% by weight carbon and about 5% to about 75% by weight oxygen;
a second electrode proximate the storage node; and
a dielectric layer between the storage node and the second electrode.
2. The capacitor assembly of claim 1 , wherein the storage node is next to a layer comprising about 20% to out 65% by weight silicon, about 0% to about 30% by weight nitrogen, about 10% to about 20% a by weight carbon, and about 5% to about 25% by weight oxygen.
3. The capacitor assembly of claim 1 , wherein the storage node is next to a layer comprising about 20% to out 65% by weight silicon, about 0% to about 15% by weight nitrogen, about 2% to about 10% by weight carbon, and about 40% to about 75% by weight oxygen.
4. The capacitor of claim 1 , wherein the storage node comprises conductively doped silicon.
5. The capacitor of claim 1 , wherein the insulative layer comprises silicon oxide or silicon nitride.
6. The capacitor of claim 1 , wherein the dielectric layer comprises silicon dioxide or silicon nitride.
7. An assembly comprising:
a substrate;
a layer comprising silicon, about 2% to about 20% by weight carbon and about 5% to about 75% by weight oxygen; and
a photoresist masking layer.
8. The assembly of claim 7 , wherein the layer comprises about 20% to about 65% by weight silicon, about 10% to about 20% by weight carbon, about 5% to about 25% by weight oxygen and about 0% o about 30% by weight nitrogen.
9. The assembly of claim 7 , wherein the layer comprises about 20% to about 65% by weight silicon, about 2% to about 10% by weight carbon, about 40% to about 75% by weight oxygen and about 0% a about 15% by weight nitrogen.
10. The assembly of claim 7 , wherein the photoresist masking layer is a patterned photoresist masking layer.
11. The assembly of claim 7 , wherein the substrate is a monocrystalline wafer.