Method for fabricating circuitry component
View Patent ↗An integrated chip package structure and method of manufacturing the same is by adhering dies on an organic substrate and forming a thin-film circuit layer on top of the dies and the organic substrate. Wherein the thin-film circuit layer has an external circuitry, which is electrically connected to the metal pads of the dies, that extends to a region outside the active surface of the dies for fanning out the metal pads of the dies. Furthermore, a plurality of active devices and an internal circuitry is located on the active surface of the dies. Signal for the active devices are transmitted through the internal circuitry to the external circuitry and from the external circuitry through the internal circuitry back to other active devices. Moreover, the chip package structure allows multiple dies with different functions to be packaged into an integrated package and electrically connecting the dies by the external circuitry.
1. A method for fabricating a circuit component, comprising:
joining a die and a first preformed substrate;
after said joining said die and said first preformed substrate, thinning said die;
joining said die and a second preformed substrate;
depositing a first patterned metal layer over said first preformed substrate, wherein said first patterned metal layer is connected to a metal pad of said die through an opening in said first preformed substrate; and
cutting said second preformed substrate.
2. The method of claim 1 , after said joining said die and said first preformed substrate, further comprising thinning said first preformed substrate, followed by said depositing said first patterned metal layer over said first preformed substrate.
3. The method of claim 2 , wherein said thinning said first preformed substrate comprises grinding.
4. The method of claim 2 , wherein said thinning said first preformed substrate comprises said thinning said first preformed substrate to a thickness of between 2 and 200 micrometers.
5. The method of claim 1 wherein said first preformed substrate comprises an organic material.
6. The method of claim 1 , wherein said first preformed substrate comprises glass.
7. The method of claim 1 , wherein said second preformed substrate comprises an organic material.
8. The method of claim 1 , after said joining said die and said first preformed substrate, further comprising forming a polymer layer over said first preformed substrate and covering said die, followed by said thinning said die.
9. The method of claim 1 , wherein said thinning said die comprises grinding.
10. The method of claim 1 , wherein forming said opening in said first preformed substrate comprises etching.
11. The method of claim 1 , wherein forming said opening in said first preformed substrate comprises drilling.
12. The method of claim 1 , wherein said depositing said first patterned metal layer comprises electroplating.
13. The method of claim 1 , wherein said depositing said first patterned metal layer comprises sputtering.
14. The method of claim 1 , wherein said depositing said first patterned metal layer comprises electroless plating.
15. The method of claim 1 , wherein said depositing said first patterned metal layer comprises depositing copper.
16. The method of claim 1 , after said depositing said first patterned metal layer, further comprising forming an insulating layer on said first patterned metal layer, followed by said cutting said second preformed substrate.
17. The method of claim 16 , after said forming said insulating layer, further comprising depositing a second patterned metal layer on said insulating layer, followed by said cutting said second preformed substrate.
18. The method of claim 1 , after said depositing said first patterned metal layer, further comprising forming a gold bump over said first patterned metal layer, followed by said cutting said second preformed substrate.
19. The method of claim 1 , after said depositing said first patterned metal layer, further comprising forming a solder bump over said first patterned metal layer, followed by said cutting said second preformed substrate.
20. The method of claim 1 , wherein forming said opening in said first preformed substrate comprises laser forming.
21. The method of claim 1 , after said depositing said first patterned metal layer, further comprising cutting said first preformed substrate.