Display device and manufacturing method thereof
View Patent ↗It is an object of the present invention to provide a display device that has a structure of an electrode where a residue of a transparent conductive film is not generated when a weak acid solution is used in etching, which is particularly appropriate for an electrode of a light-emitting element. A display device according to the present invention has an electrode that has a laminated structure of laminated transparent conductive films, and the electrode has a first transparent conductive film as the bottom layer, where no residue is generated when a weak acid solution is used in etching, and a second transparent conductive film as the top layer, which has a work function of 5.0 eV or more.
1. A display device comprising a transistor and an electrode electrically connected to the transistor,
wherein the electrode comprises a first transparent conductive film comprising indium tin oxide containing one or both of silicon oxide and silicon as the bottom layer, and a second transparent conductive film comprising indium tin oxide as the top layer.
2. The display device according to claim 1 , wherein the second transparent conductive film has a film thickness of 30 nm or less.
3. The display device according to claim 1 , wherein a terminal portion of a flexible printed circuit has a laminated structure of a conductive film that has a specific resistance of 3 μΩ or less, the first transparent conductive film, and the second transparent conductive film.
4. The display device according to claim 1 , wherein a silicon nitride film is provided below the first transparent conductive film.
5. The display device according to claim 1 , wherein the display device is applied in an electronic device selected from the group consisting of a video camera, a laptop personal computer, a personal digital assistant, a digital camera and a mobile phone.
6. A display device comprising a transistor and an electrode electrically connected to the transistor,
wherein the electrode comprises a first transparent conductive film comprising indium tin oxide containing one or both of silicon oxide and silicon as the bottom layer, and a second transparent conductive film that has a work function of 5.0 eV or more as the top layer.
7. The display device according to claim 6 , wherein the second transparent conductive film has a film thickness of 30 nm or less.
8. The display device according to claim 6 , wherein a terminal portion of a flexible printed circuit has a laminated structure of a conductive film that has a specific resistance of 3 μΩ or less, the first transparent conductive film, and the second transparent conductive film.
9. The display device according to claim 6 , wherein a silicon nitride film is provided below the first transparent conductive film.
10. The display device according to claim 6 , wherein the display device is applied in an electronic device selected from the group consisting of a video camera, a laptop personal computer, a personal digital assistant, a digital camera and a mobile phone.
11. A display device comprising a transistor and an electrode electrically connected to the transistor,
wherein the electrode comprises a first amorphous transparent conductive film as the bottom layer and a second crystalline transparent conductive film as the top layer.
12. The display device according to claim 11 , wherein the second transparent conductive film has a film thickness of 30 nm or less.
13. The display device according to claim 11 , wherein a terminal portion of a flexible printed circuit has a laminated structure of a conductive film that has a specific resistance of 3 μΩ or less, the first transparent conductive film, and the second transparent conductive film.
14. The display device according to claim 11 , wherein a silicon nitride film is provided below the first transparent conductive film.
15. The display device according to claim 11 , wherein the display device is applied in an electronic device selected from the group consisting of a video camera, a laptop personal computer, a personal digital assistant, a digital camera and a mobile phone.
16. A display device comprising a transistor and an electrode electrically connected to the transistor,
wherein the electrode comprises a first transparent conductive film comprising amorphous indium tin oxide as the bottom layer and a second transparent conductive film comprising crystalline indium tin oxide as the top layer.
17. The display device according to claim 16 , wherein the second transparent conductive film has a film thickness of 30 nm or less.
18. The display device according to claim 16 , wherein a terminal portion of a flexible printed circuit has a laminated structure of a conductive film that has a specific resistance of 3 μΩ or less, the first transparent conductive film, and the second transparent conductive film.
19. The display device according to claim 16 , wherein a silicon nitride film is provided below the first transparent conductive film.
20. The display device according to claim 16 , wherein the display device is applied in an electronic device selected from the group consisting of a video camera, a laptop personal computer, a personal digital assistant, a digital camera and a mobile phone.
21. A display device comprising a transistor and an electrode electrically connected to the transistor,
wherein the electrode comprises a first transparent conductive film including oxygen at 61 atomic %, indium at 34 atomic %, tin at 2 atomic %, and silicon at 3 atomic % as the bottom layer, and a second transparent conductive film including oxygen at 62 atomic %, indium at 36 atomic %, and tin at 2 atomic % as the top layer.
22. The display device according to claim 21 , wherein the second transparent conductive film has a film thickness of 30 nm or less.
23. The display device according to claim 21 , wherein a terminal portion of a flexible printed circuit has a laminated structure of a conductive film that has a specific resistance of 3 μΩ or less, the first transparent conductive film, and the second transparent conductive film.
24. The display device according to claim 21 , wherein a silicon nitride film is provided below the first transparent conductive film.
25. The display device according to claim 21 , wherein the display device is applied in an electronic device selected from the group consisting of a video camera, a laptop personal computer, a personal digital assistant, a digital camera and a mobile phone.