Semiconductor package having interconnect with conductive members
An interconnect for semiconductor components such as dice, wafers and chip scale packages is provided. The interconnect includes a substrate, and patterns of contacts formed on a face side of the substrate adapted to electrically engage external contacts (e.g., bond pads, solder bumps) on the components. The interconnect also includes insulated conductive members through the substrate, which provide direct electrical paths from the interconnect contacts to a backside of the substrate. The conductive members can be formed by laser machining openings in the substrate, and then filling the openings with a conductive material (e.g., metal, conductive polymer). The conductive members can also include pads with contact balls, configured for electrical interface with a test apparatus, such as test carrier or wafer handler. The interconnect can be used to construct test systems for testing semiconductor components, or to construct chip scale packages and multi chip modules.
1. A semiconductor package comprising:
a semiconductor die comprising a bumped contact;
an interconnect on the die having a chip scale outline a first side and an opposing second side;
the interconnect comprising:
a contact on the first side comprising a conductive layer bonded to the bumped contact;
a conductive member comprising an opening extending through the conductive layer and the interconnect from the first side to the second side and a conductive material in the opening in contact with the conductive layer; and
an external contact on the second side in electrical communication with the conductive member.
2. The package of claim 1 further comprising an underfill layer between the interconnect and the die.
3. The package of claim 1 wherein the conductive member comprises a solder substantially filling the opening.
4. The package of claim 1 wherein the contact includes a penetrating member configured to penetrate the bumped contact.
5. A semiconductor package comprising:
a semiconductor die comprising a plurality of first contacts;
an interconnect attached to the die comprising:
a substrate having a first side, an opposing second side, and a chip scale outline;
a plurality of second contacts on the first side bonded to the first contacts on the die;
a plurality of conductive members in the substrate in electrical communication with the second contacts, each conductive member comprising an opening with a selected diameter extending through a second contact and through the substrate from the first side to the second side, and a conductive material in the opening; and
a plurality of third contacts on the second side in electrical communication with the conductive members.
6. The package of claim 5 wherein the selected diameter is from 10 μm to 2 mils.
7. The package of claim 5 wherein the substrate comprises a material selected from the group consisting of a ceramic material, a glass filled resin material and a semiconductor material.
8. The package of claim 5 wherein the first contacts comprise bumps and the second contacts comprise recesses and conductive layers on the recesses bonded to the bumps.
9. The package of claim 5 wherein the third contacts comprise balls.
10. The package of claim 5 further comprising an underfill layer between the die and the interconnect.
11. A semiconductor package comprising:
an interconnect comprising a substrate having a chip scale outline, a first side and an opposing second side, a plurality of contacts on the first side, a plurality of conductive members comprising openings through the contacts and through the substrate from the first side to the second side and a conductive material in the openings, and a plurality of external contacts on the second side in electrical communication with the conductive members; and
a semiconductor die attached to the first side in electrical communication with the contacts.
12. The package of claim 11 further comprising an underfill layer between the die and the first side.
13. The package of claim 11 wherein the contacts comprise bumps.
14. The package of claim 11 wherein the external contacts comprise balls.
15. The package of claim 11 wherein the substrate comprises a material selected from the group consisting of a ceramic material, a glass filled resin, and a semiconductor material.
16. The package of claim 11 wherein each opening has a selected diameter of from 10 μm to 2 mils.
17. The package of claim 11 further comprising an insulating layer in each opening.