Semiconductor constructions
View Patent ↗The invention includes methods of forming implant regions between and/or under transistor gates. In one aspect, a pair of transistor gates is partially formed, and a layer of conductive material is left extending between the transistor gates. A dopant is implanted through the conductive material to form at least one implant region between and/or beneath the partially formed transistor gates, and subsequently the conductive material is removed from between the gates. The gates can be incorporated into various semiconductor assemblies, including, for example, DRAM assemblies.
1. A semiconductor construction, comprising:
a semiconductive material substrate;
a conductive layer over the substrate, the conductive layer having a thin segment between a pair of thicker segments, one of the thicker segments being a first thicker segment and the other being a second thicker segment;
a first gate stack over the first thicker segment and a second gate stack over the second thicker segment, the first and second gate stacks being spaced from one another by a gap extending over the thin segment;
the first and second gate stacks comprising one or more conductive materials over the thicker segments and comprising one or more insulative materials over the one or more conductive materials; the stacks having sidewalls extending substantially vertically along the thicker segments, one or more conductive materials and one or more insulative materials;
a masking material over portions of the first and second stacks, and having an opening extending therethrough to the thin segment; the opening having a periphery that includes the stack sidewalls; the thicker segments, one or more conductive materials and one or more insulative materials of the stacks being exposed along the stack sidewalls within the opening; and
at least one conductively-doped region within the substrate under the thin segment.
2. The construction of claim 1 wherein the one or more insulative layers include a layer comprising silicon nitride.
3. The construction of claim 1 wherein the one or more conductive materials comprise a layer of tungsten over a layer of tungsten nitride.
4. The construction of claim 1 wherein the thin segment has a thickness of from about 100 Å to about 400 Å.
5. The construction of claim 1 wherein the at least one conductively-doped region includes at least one region which extends to under at least one of the first and second gate stacks.
6. The construction of claim 1 wherein the conductive layer consists of conductively-doped silicon.
7. The construction of claim 1 wherein the one or more conductively-doped diffusion regions include at least one conductively-doped diffusion region that extends from one of the gate stacks to the other of the gate stacks.