Patent Application
Utility
App. No. 10/826,823
· Confirmation No. 1743
OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION
Abandoned -- Failure to Pay Issue Fee
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-06-13 | ABN |
Abandonment | 1 | View | |
| 2008-02-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2008-02-19 | FWCLM |
Index of Claims | 3 | View | |
| 2008-02-19 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2008-02-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-02-19 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2008-02-19 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2007-11-19 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2007-11-19 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2007-11-09 | PA.. |
Power of Attorney | 2 | View | |
| 2007-11-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-11-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2007-11-08 | CLM |
Claims | 8 | View | |
| 2007-11-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2007-11-08 | OATH |
Oath or Declaration filed | 5 | View | |
| 2007-11-08 | ADS |
Application Data Sheet | 5 | View | |
| 2007-11-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-11-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-08-21 | CTNF |
Non-Final Rejection | 9 | View | |
| 2007-08-21 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2007-08-21 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-08-21 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2007-08-21 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-08-15 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2007-07-26 | FRPR |
Certified Copy of Foreign Priority Application | 22 | View | |
| 2007-06-07 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2007-06-07 | SPEC |
Specification | 1 | View | |
| 2007-06-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2007-06-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-05-14 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2007-04-12 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2007-04-12 | SPEC |
Specification | 1 | View | |
| 2007-04-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2007-03-13 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2007-03-13 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2006-06-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-06-14 | A.PE |
Preliminary Amendment | 4 | View | |
| 2006-06-14 | CLM |
Claims | 8 | View | |
| 2006-06-14 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2006-04-28 | NTC.A.NONCPL |
Notice to the applicant regarding a non-compliant or non-responsive amendment | 2 | View | |
| 2005-11-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2005-11-14 | FOR |
Foreign Reference | 6 | View | |
| 2005-11-14 | FOR |
Foreign Reference | 8 | View | |
| 2005-11-14 | FOR |
Foreign Reference | 44 | View | |
| 2004-04-15 | TRNA |
Transmittal of New Application | 7 | View | |
| 2004-04-15 | SPEC |
Specification | 10 | View | |
| 2004-04-15 | CLM |
Claims | 13 | View | |
| 2004-04-15 | ABST |
Abstract | 1 | View | |
| 2004-04-15 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2004-04-15 | OATH |
Oath or Declaration filed | 4 | View | |
| 2004-04-15 | A.I. |
Informal or Non-Responsive Amendment | 1 | View | |
| 2004-04-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-04-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-15 | WFEE |
Fee Worksheet (SB06) | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
355/30
G03F7/70825
G02B7/028
G03F7/70108
G03F7/70241
G03F7/70358
Prosecution
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2862
- Customer No.
- 26161
- Docket No.
- 17979-050002 / 98003 PUS
- Confirmation No.
- 1743
Foreign Priority
198 07 094.2
·
1998-02-20
·
GERMANY
Publication
- Pub. No.
- US20040207825A1
- Pub. Date
- 2004-10-21
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Quick Facts
- App. No.
- 10/826,823
- Filed
- 2004-04-15
- Pub. No.
- US20040207825A1
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2862
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