Organic electro luminescence element and manufacturing method thereof
An organic electro luminescence element includes a substrate, an anode isolating film formed of an insulator on the substrate, an anode conductive layer formed on an upper surface of the substrate in an area partitioned by the anode isolating film, and an element isolating film formed of an insulator to enclose the anode isolating film and to be wider downward. Further, on the upper surface of the anode isolating film, a conductive film of the same type as the anode conductive layer is formed, which conductive layer is also covered by the element isolating film. Preferably, the anode isolating film has its upper surface made larger than the lower surface.
1. An organic electro luminescence element, comprising:
a substrate;
an anode isolating film formed of an insulator on said substrate;
an anode conductive layer formed on an upper surface of said substrate in an area partitioned by said anode isolating film; and
an element isolating film formed of an insulator to enclose said anode isolating film, and made wider downward; and wherein
said anode isolating film has an upper surface made larger than a lower surface.
2. The organic electro luminescence element according to claim 1 , wherein
a film of the same type as said anode conductive layer is formed on an upper surface of said anode isolating film, and the film is covered by said element isolating film.
3. The organic electro luminescence element according to claim 1 , wherein the anode isolating film comprises a side surface that is inclined in an inverse tapered shaped configuration.
4. The organic electro luminescence element according to claim 1 , wherein
said anode conductive layer includes a layer of high work function, having work function of at least 4.8 eV.
5. The organic electro luminescence element according to claim 4 , wherein
said anode conductive layer has a stacked structure including at least two layers, and said layer of high work function is positioned as an uppermost layer of said stacked structure.
6. The organic electro luminescence element according to claim 5 , wherein
said anode conductive layer includes a layer having reflectance of at least 80% in a visible range, as a second or lower layer from the top of said stacked structure.
7. The organic electro luminescence element according to claim 4 , wherein
said layer of high work function has a thickness of at least 0.5 nm and at most 10 nm.
8. A method of manufacturing an organic electro luminescence element, comprising the steps of:
forming, on an upper surface of a substrate, an anode isolating film of an insulator such that an upper surface of the isolating film is made larger than a lower surface;
forming an anode conductive layer of a metal from an upper side of said substrate to an area including said anode isolating film; and
forming an element isolating film of an insulator to enclose said anode isolating film and to be made wider downward.