Semiconductor device manufacture method
View Patent ↗An electric conductive film is formed on the insulating surface of a substrate, the substrate having a trench formed on the insulating surface, and the conductive film being filled in the trench. Chemical mechanical polishing is executed to expose the insulating surface of the substrate and leave a portion of the conductive film in the trench. The surface of the substrate having the exposed conductive film in the trench and the exposed insulating surface is exposed to first liquid. After being exposed to the first liquid, the surface of the substrate is exposed to second liquid. The first liquid is either solution which contains at least one first substance selected from a first group consisting of benzotriazole, derivative of benzotriazole and interfacial active agent, or water. The second solution is solution which contains the first substance at a density higher than a density of the first liquid.
1. A semiconductor device manufacture method, comprising steps of:
polishing a substrate using chemical mechanical polishing; and
removing foreign matters left on a polished surface of the substrate in a separate cleaning step after completion of the chemical mechanical polishing of the substrate;
wherein the step of removing foreign matters include steps of:
bringing the polished surface of the substrate into contact with first liquid; and
bringing the polished surface of the substrate into contact with second liquid after being brought into contact with to the first liquid, and
wherein the first liquid is either solution which contains at least one first substance selected from a first group consisting of benzotriazole, derivative of benzotriazole and interfacial active agent, or water, and the second liquid is solution which contains at least one of the first group consisting of benzotriazole, derivative of benzotriazole and interfacial active agent at a weight percentage higher than a weight percentage of the first group in the first liquid.
2. A semiconductor device manufacture method according to claim 1 , wherein in the step of bringing into contact with the first liquid, the polished surface of the substrate is polished using the first liquid as polishing liquid under pressure.
3. A semiconductor device manufacture method according to claim 1 , wherein in the step of bringing into contact with the second liquid, the polished surface of the substrate is polished using the second liquid as polishing liquid under pressure.
4. A semiconductor device manufacture method according to claim 1 , wherein the second liquid contains benzotriazole or benzotriazole derivative at a weight percentage of 0.001 wt. % or more.
5. A semiconductor device manufacture method according to claim 1 , wherein the substrate includes an insulating surface occupying a portion of the polished surface and made of second substance selected from a group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon carbooxide and silicon carbonitride.
6. A semiconductor device manufacture method according to claim 1 , wherein the substrate includes a conductive film exposed on the polished surface and made of: metal material selected from a second group consisting of Cu, Ta, W, Ti, Al, Ru, Pt and Ir; alloy which contains one metal material selected from the second group; conductive oxide compound of one metal material selected from the second group; conductive nitride compound of one metal material selected from the second group; conductive carbide compound of one metal material selected from the second group; polysilicon; or amorphous silicon.
7. A semiconductor device manufacture method according to claim 1 , wherein after polishing the substrate, the polished surface of the substrate is brought into contact with the first liquid without drying the surface, and after being brought into contact with the first liquid, the polished surface of the substrate is brought into contact with the second liquid without drying the surface.
8. A semiconductor device manufacture method according to claim 1 , wherein the first and second liquids are free of abrasives.